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首页> 外文期刊>Research Disclosure >ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR
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ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR

机译：电磁电机系统，位置控制系统，阶段装置，光刻设备，确定电磁电动机的电动机依赖性换向模型的方法

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It would he desirable to obtain an accurate model for an electromagnetic motor in a more efficient manner, compared to known methods. According to a first aspect of the invention, there is provided a method of determining a motor-dependent commutation model for an electromagnetic motor, whereby the electromagnetic motor comprises a first member comprising a coil array comprising at least M coils, and a second member comprising a magnet array configured to generate a spatially alternating magnetic field, whereby the first member and the second member are configured to displace relative to each other in N degrees of freedom, N ＜ M. by supplying the at least M coils with respective at least M currents Im, thereby generating forces in the N degrees of freedom, the method comprising the steps of: 1.obtaining a commutation model G for the electromagnetic motor, the general commutation model G providing a relationship between desired forces Fc in the N degrees of freedom and the at least M currents Im applied to the coil array by Im = G * Fc; 2.defining an NxN motor-dependent compensation matrix A; 3.operating the electromagnetic motor by performing a predetermined displacement by: 3.1determining the desired forces Fc to realise the predetermined displacement 3.2determining the at least M currents Im for the coil array by Im = G * Fc; 3.3applying the at least M currents Im to perform the predetermined displacement; 4.determining actual forces Fm in the N degrees of freedom occurring during the predetermined displacement; 5.determining the compensation matrix A based on Fc = A*Fm. 6.oblaining the motor-dependent commutation model as G*A. According to a second aspect of the invention, there is provided an electromagnetic motor system, the electromagnetic motor system comprises an electromagnetic motor, comprising a first member and a second member, the first member comprising a coil array comprising at least M coils; the second member comprising an array of magnets configured to generate a spatially alternating magnetic field, whereby the first member and the second member are configured to displace relative to each other in N degrees of freedom. N ＜ M, by supplying the at least M coils with respective at least M currents Im, thereby generating forces in the N degrees of freedom, the electromagnetic motor system further comprising a control unit configured to generate control signals for controlling the electromagnetic motor, whereby the control unit comprises a motor-dependent commutation model obtained using the method according to the invention. According to a third aspect of the invention, there is provided a position control system for an electromagnetic motor, the electromagnetic motor comprising a first member and a second member, the first member comprising a coll array comprising at least M coils; the second member comprising an array of magnets configured to generate a spatially alternating magnetic field, whereby the first member and the second member are configured to displace relative to each other in N degrees of freedom, N ＜ M. by supplying the at least M coils with respective at least M currents 1m. thereby generating forces in the N degrees of freedom, the position control system comprising a control unit configured to generate control signals for controlling the electromagnetic motor, whereby the control unit comprises a motor-dependent commutation model obtained using the method according to the invention.
机译：与已知方法相比，他希望以更有效的方式获得用于电磁马达的精确模型。根据本发明的第一方面，提供了一种确定电磁马达的电动机相关换向模型的方法，由此电磁马达包括包括至少M线圈的线圈阵列的第一构件和包括的第二构件构造成产生空间交替磁场的磁体阵列，由此第一构件和第二构件被配置为在N自由度中相对于彼此移动，N

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    《Research Disclosure》 |2021年第688期|2155-2156|共2页
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