Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling

Jamali Mohammad; Gerhardt Ilja; Rezai Mohammad; Frenner Karsten; Fedder Helmut; Wrachtrup Jorg

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Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling

机译：通过聚焦离子束铣削在单个缺陷中心周围制造出微观金刚石固体浸没透镜

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Recent efforts to define microscopic solid-immersion-lenses (SIL) by focused ion beam milling into diamond substrates that are registered to a preselected single photon emitter are summarized. We show how we determine the position of a single emitter with at least 100 nm lateral and 500 nm axial accuracy, and how the milling procedure is optimized. The characteristics of a single emitter, a Nitrogen Vacancy (NV) center in diamond, are measured before and after producing the SIL and compared with each other. A count rate of 1.0 × 10 counts/s is achieved with a [111] oriented NV center.

机译：总结了通过将聚焦离子束铣削到预先选择的单光子发射器配准的金刚石基板中来定义微观固体浸没透镜（SIL）的最新工作。我们展示了如何确定横向精度至少为100 nm，轴向精度至少为500 nm的单个发射器的位置，以及如何优化铣削过程。在生产SIL之前和之后测量单个发射器（金刚石中的氮空位（NV）中心）的特性，并将其相互比较。面向[111]的NV中心可实现1.0×10 counts / s的计数率。

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《Review of Scientific Instruments》 |2014年第12期|1-7|共7页
作者
Jamali Mohammad; Gerhardt Ilja; Rezai Mohammad; Frenner Karsten; Fedder Helmut; Wrachtrup Jorg;
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3. Physikalisches Institut and Stuttgart Research Center of Photonic Engineering (SCoPE), Universität Stuttgart, Pfaffenwaldring 57, Stuttgart D-70569, Germany;

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2. The field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling [J] . Science and technology of advanced materials . 2005,第7期

机译：聚焦离子束铣削制备高纵横比金刚石纳米锥阵列的场发射特性
3. The field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling [J] . Z.L. Wang, Q. Wang, H.J. Li, Science and Technology of Advanced Materials . 2005,第7期

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5. Optical defect centers and surface morphology of diamond single crystals grown by chemical vapor deposition. [D] . Baker, Paul A. 2005

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6. Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling [O] . Marcel Mayer, Kahraman Keskinbora, Corinne Grévent, -1

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7. Microscopic diamond Solid-Immersion-Lenses fabricated around single defect ceneters by focussed ion beam milling [O] . Jamali, Mohammad, Gerhardt, Ilja, Rezai, Mohammad, 2014

机译：微观金刚石固体浸没透镜围绕单个制造通过聚焦离子束铣削来制造缺陷

Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling

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