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首页> 外文期刊>Review of Scientific Instruments >Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads
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Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

机译：射频电流-电压探头，用于多频不匹配负载中的阻抗和功率测量

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摘要

A broad-band, inline current-voltage probe, with a characteristic impedance of 50 Ω, is presented for the measurement of voltage and current waveforms, impedance, and power in rf systems. The probe, which uses capacitive and inductive sensors to determine the voltage and current, respectively, can be used for the measurement of single or multi-frequency signals into both matched and unmatched loads, over a frequency range of about 1–100 MHz. The probe calibration and impedance/power measurement technique are described in detail, and the calibrated probe results are compared with those obtained from a vector network analyzer and other commercial power meters. Use of the probe is demonstrated with the measurement of power into an unmatched capacitively coupled plasma excited by multi-frequency tailored voltage waveforms.
机译：提出了一种具有50Ω特性阻抗的宽带在线电流-电压探头，用于测量射频系统中的电压和电流波形，阻抗和功率。该探头分别使用电容式和电感式传感器确定电压和电流，可用于在大约1–100 MHz的频率范围内测量匹配或不匹配负载中的单频或多频信号。详细介绍了探头校准和阻抗/功率测量技术，并将校准后的探头结果与从矢量网络分析仪和其他商用电表获得的结果进行了比较。通过对通过多频率定制电压波形激发的，无与伦比的电容耦合等离子体中的功率进行测量，证明了该探头的使用。

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