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首页> 外文期刊>Review of Scientific Instruments >Design of a laser-assisted tomographic atom probe at Münster University
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Design of a laser-assisted tomographic atom probe at Münster University

机译：明斯特大学（MünsterUniversity）的激光辅助层析X射线原子探针的设计

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摘要

To benefit from the latest technical improvements in atom probe analysis, a new tomographic atom probe has been built at the University of Münster, Germany. The instrument utilizes a femtosecond laser system with a high repetition rate combined with the ability of using a micrometer-sized extraction electrode and a wide angle configuration. Since field evaporation is triggered by laser pulses instead of high-voltage pulses, the instrument offers the ability to expand the range of analyzed materials to poorly conducting or insulating materials such as oxides, glasses, ceramics, and polymeric materials. The article describes the design of the instrument and presents characterizing measurements on metals, semiconductors, and oxide ceramic. © 2010 American Institute of Physics Article Outline INTRODUCTION FIELD EVAPORATION AND LASER PULSING INSTRUMENTAL DESIGN Vacuum system and cooling Microelectrodes and specimen stage Detector and HV system Laser system CHARACTERIZATION OF THE INSTRUMENT Calibration of laser field Calibration of mass resolution and analysis volume Measurements of nonmetallic materials CONCLUSION
机译：为了从原子探针分析的最新技术改进中受益，德国明斯特大学建造了一种新的层析X射线原子探针。该仪器采用飞秒激光系统，具有高重复率，并具有使用微米级引出电极和广角配置的能力。由于场蒸发是由激光脉冲而不是高压脉冲触发的，因此该仪器能够将分析材料的范围扩大到导电性或绝缘性差的材料，例如氧化物，玻璃，陶瓷和聚合材料。本文介绍了仪器的设计，并介绍了对金属，半导体和氧化物陶瓷的特性测量。 ©2010美国物理研究所文章大纲简介蒸发和激光脉冲的仪器设计真空系统和冷却微电极和样品台检测器和高压系统激光系统仪器的特性激光场的校准质量分辨率和分析量的校准非金属材料的测量结论

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  • 来源
    《Review of Scientific Instruments》 |2010年第4期|p.1-8|共8页
  • 作者

    Ralf Schlesiger; Christian Oberdorfer; Rol Würz; Gerd Greiwe; Patrick Stender; Michael Artmeier; Patrick Pelka; Frank Spaleck; Guido Schmitz;

  • 作者单位

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg, Industriestr. 6, 70565 Stuttgart, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

    Institute of Material Physics, Westfälische Wilhelms-Universität, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    atom probe field ion microscopy; laser beam applications; microelectrodes; tomography;

    机译：原子探针场离子显微镜;激光束应用;微电极;断层扫描;

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