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首页> 外文期刊>Review of Scientific Instruments >A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation
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A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation

机译：新型高度自动溅射设备，用于利用同步加速器辐射原位研究沉积过程

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HASE (Highly Automated Sputter Equipment) is a new mobile setup developed to investigate deposition processes with synchrotron radiation. HASE is based on an ultra-high vacuum sputter deposition chamber equipped with an in-vacuum sample pick-and-place robot. This enables a fast and reliable sample change without breaking the vacuum conditions and helps to save valuable measurement time, which is required for experiments at synchrotron sources like PETRA III at DESY. An advantageous arrangement of several sputter guns, mounted on a rotative flange, gives the possibility to sputter under different deposition angles or to sputter different materials on the same substrate. The chamber is also equipped with a modular sample stage, which allows for the integration of different sample environments, such as a sample heating and cooling device. The design of HASE is unique in the flexibility. The combination of several different sputtering methods like standard deposition, glancing angle deposition, and high pressure sputter deposition combined with heating and cooling possibil-ities of the sample, the large exit windows, and the degree of automation facilitate many different grazing incidence X-ray scattering experiments, such as grazing incidence small and wide angle X-ray scattering, in one setup. In this paper we describe in detail the design and the performance of the new equipment and present the installation of the HASE apparatus at the Micro and Nano focus X-ray Scattering beamline (MiNaXS) at PETRA III. Furthermore, we describe the measurement options and present some selected results. The HASE setup has been successfully commissioned and is now available for users.
机译：HASE（高度自动溅射设备）是一种新型移动设备，旨在研究同步加速器辐射的沉积过程。 HASE基于配备了真空样品拾取和放置机器人的超高真空溅射沉积室。这样可以在不破坏真空条件的情况下快速可靠地进行样品更换，并有助于节省宝贵的测量时间，这是在同步加速器源（如DESY的PETRA III）上进行实验所必需的。多个安装在旋转法兰上的喷枪的有利布置使得可以在不同的沉积角度下进行溅射或在同一基板上溅射不同的材料。该室还配备了模块化的样品台，可以集成不同的样品环境，例如样品加热和冷却设备。 HASE的设计在灵活性方面独树一帜。几种不同的溅射方法（例如标准沉积，掠射角沉积和高压溅射沉积）的结合，加上样品的加热和冷却可能性，大的出射窗以及自动化程度，可以促进许多不同的掠入射X射线一种设置中的散射实验，例如掠入射小和广角X射线散射。在本文中，我们详细描述了新设备的设计和性能，并介绍了HASE设备在PETRA III的微和纳米焦点X射线散射光束线（MiNaXS）上的安装。此外，我们描述了测量选项并给出了一些选定的结果。 HASE设置已成功调试，现在可供用户使用。

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