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首页> 外文期刊>Review of Scientific Instruments >Glow-to-arc transition events in H2-Ar direct current pulsed plasma: Automated measurement of current and voltage
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Glow-to-arc transition events in H2-Ar direct current pulsed plasma: Automated measurement of current and voltage

机译：H2-Ar直流脉冲等离子体中的辉光弧过渡事件：电流和电压的自动测量

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摘要

The glow-to-arc transition phenomena (arcing) observed in plasma reactors used in materials processing was studied through the arcs characteristic current and voltage waveforms. In order to capture these arcs signals, a LABVIEW™ based automated instrumentation system (ARCVIEW) was developed, including the integration of an oscilloscope equipped with proper current and voltage probes. The system also allows capturing the process parameters at the arc occurrence moments, which were used to map the arcs events conditions. Experiments in H2-Ar DC pulsed plasma returned signals data from 215 arcs events, which were analyzed through software routines. According to the results, an anti-arcing system should react in the time order of few microseconds to prevent most of the damage caused by the undesired arcing phenomena.
机译：通过电弧特性电流和电压波形研究了在材料加工中使用的等离子体反应器中观察到的辉光弧过渡现象（电弧）。为了捕获这些电弧信号，开发了基于LABVIEW™的自动化仪器系统（ARCVIEW），包括集成了配有适当电流和电压探头的示波器。该系统还允许捕获电弧发生时刻的过程参数，这些参数用于映射电弧事件条件。在H2-Ar DC脉冲等离子体等离子体中，通过215个电弧事件返回的信号数据进行了实验，并通过软件例程对其进行了分析。根据结果​​，防电弧系统应在几微秒的时间内做出反应，以防止由不希望的电弧现象引起的大部分损坏。

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