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首页> 外文期刊>Review of Scientific Instruments >Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam
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Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam

机译：通过脉冲激光沉积和聚焦离子束的组合制造多层劳厄透镜

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摘要

X-ray diffractive techniques using Fresnel zone plate lenses of various forms are of great technical interest because of their ability to form images at very high spatial resolution, but the zone plates are unfortunately very hard to produce by lithography. Alternatively, multilayer Laue lenses (MLLs) and multilayer zone plates are used due to the higher and easily adjustable aspect ratio necessary for different wavelengths. In this paper, the fabrication of a MLL by a combination of pulsed laser deposition and focused ion beam machining is described. All steps of the production of a Ti/ZrO2 microlens test structure with focal length of 220 μm (for a wavelength of 2.88 nm in the “water window” regime) are explained in detail. It is shown that this combination of two powerful techniques is very effective for the fabrication of MLL. All steps can be done in a very precise and controlled way without introducing damage to the grown multilayer structures.
机译：使用各种形式的菲涅耳波带片透镜的X射线衍射技术由于其能够以非常高的空间分辨率形成图像的能力而引起了极大的技术兴趣，但是不幸的是，这些波带片很难通过光刻法制造。可选地，由于不同波长所需的更高且容易调节的纵横比，因此使用多层劳厄透镜（MLL）和多层波带片。在本文中，描述了通过脉冲激光沉积和聚焦离子束加工相结合的方式制造多层LL。详细说明了生产焦距为220μm（在“水窗”状态下波长为2.88 nm）的Ti / ZrO2微透镜测试结构的所有步骤。结果表明，两种强大技术的结合对于制造MLL非常有效。可以以非常精确和可控的方式完成所有步骤，而不会损坏已生长的多层结构。

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