The nature of electron‐induced changes in the electrical properties of Zener diodes and their application to a Zener diode dosimeter are presented. A standard Zener diode is used as a small size (0.15×0.4×0.4 mm), high‐level dose detector. The irradiated dose can be estimated by a shift of the breakdown voltage of the Zener diode. The distinct advantages of its small size and superior resistance to radiation damage enable us to measure the cross‐sectional profile of the high‐intensity electron beam from a linac with high spatial resolution of about 0.4 mm.
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