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Health Risk Assessment of Photoresists Used in an Optoelectronic Semiconductor Factory

机译：光电子半导体工厂中使用的光刻胶的健康风险评估

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Photoresist materials are indispensable in photolithography, a process used in semiconductor fabrication. The work process and potential hazards in semiconductor production have raised concerns as to adverse health effects. We therefore performed a health risk assessment of occupational exposure to positive photoresists in a single optoelectronic semiconductor factory in Taiwan. Positive photoresists are widely used in the optoelectronic semiconductor industry for photolithography. Occupational exposure was estimated using the Stoffenmanager (R) model. Bayesian modeling incorporated available personal air sampling data. We examined the composition and by-products of the photoresists according to descriptions published in the literature and patents; the main compositions assessed were propylene glycol methyl ether acetate (PGMEA), novolac resin, photoactive compound, phenol, cresol, benzene, toluene, and xylene. Reference concentrations for each compound were reassessed and updated if necessary. Calculated hazard quotients were greater than 1 for benzene, phenol, xylene, and PGMEA, indicating that they have the potential for exposures that exceed reference levels. The information from our health risk assessment suggests that benzene and phenol have a higher level of risk than is currently acknowledged. Undertaking our form of risk assessment in the workplace design phase could identify compounds of major concern, allow for the early implementation of control measures and monitoring strategies, and thereby reduce the level of exposure to health risks that workers face throughout their career.
机译：光刻胶是半导体制造中必不可少的光刻工艺。半导体生产中的工作过程和潜在危害引起了人们对不良健康影响的担忧。因此，我们在台湾的一家光电半导体工厂中对正性光刻胶的职业暴露进行了健康风险评估。正性光致抗蚀剂在光电子半导体工业中广泛用于光刻。使用Stoffenmanager（R）模型估算职业暴露。贝叶斯建模结合了可用的个人空气采样数据。根据文献和专利中公开的描述，我们检查了光致抗蚀剂的组成和副产物。评估的主要成分是丙二醇甲醚乙酸酯（PGMEA），酚醛清漆树脂，光活性化合物，苯酚，甲酚，苯，甲苯和二甲苯。重新评估每种化合物的参考浓度，并在必要时进行更新。苯，苯酚，二甲苯和PGMEA的计算得出的危险商大于1，表明它们的潜在暴露量超过参考水平。来自我们健康风险评估的信息表明，苯和苯酚的风险水平高于目前公认的水平。在工作场所设计阶段进行我们形式的风险评估可以识别出主要关注的化合物，并允许及早实施控制措施和监控策略，从而减少工人在整个职业生涯中面临的健康风险。

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