首页> 外文期刊>Robotics and Machine Learning >Researchers Submit Patent Application, 'Robot Systems, Apparatus, and Methods Adapted to Transport Substrates in Electronic Device Manufacturing', for Approval
【24h】

Researchers Submit Patent Application, 'Robot Systems, Apparatus, and Methods Adapted to Transport Substrates in Electronic Device Manufacturing', for Approval

机译:研究人员提交了专利申请“适用于电子设备制造中运输基质的机器人系统,设备和方法”以供批准

获取原文
获取原文并翻译 | 示例
           

摘要

As a supplement to the background information on this patent application, VerticalNews correspondents also obtained the inventors' summary information for this patent: "In one aspect an electronic device processing system is provided. The system includes a chamber, a robot apparatus received in the chamber and adapted to transport a substrate, the robot apparatus including a boom linkage adapted to rotate about a first rotational axis, an upper arm link housing coupled to the boom linkage at a first radial position offset from the first rotational axis, the upper arm link housing adapted to rotate about a second rotational axis at the first radial position, a forearm link housing coupled to the upper arm link housing at a second position spaced from the second rotational axis, and adapted for rotation relative to the upper arm link housing about a third rotational axis at the second position, a wrist member coupled to, and adapted for rotation relative to the forearm link housing about a fourth rotational axis, the wrist member adapted to couple to an end effector, wherein the end effector is adapted to carry a substrate, and a forearm drive member rigidly coupled to the boom linkage and having a forearm driving element extending through the upper arm link housing, the forearm driving element coupled to a driven member of the forearm link housing.
机译:作为对该专利申请的背景信息的补充,VerticalNews的记者还获得了该专利的发明人的摘要信息:“一方面,提供了一种电子设备处理系统。该系统包括腔室,容纳在腔室内的机器人设备该机器人设备包括:臂架,该臂架适于绕第一旋转轴线旋转;上臂连杆壳体,该上臂连杆壳体在偏离该第一旋转轴线的第一径向位置处与该臂架连杆相连,该上臂连杆壳体适于在第一径向位置绕第二旋转轴线旋转,前臂连杆外壳在与第二旋转轴线间隔开的第二位置处联接到上臂连杆外壳,并且适于相对于上臂连杆外壳绕第三轴线旋转在第二位置的旋转轴上,腕部件联接到并适于相对于前臂连杆壳体旋转。第四旋转轴,腕构件适于联接至末端执行器,其中,末端执行器适于承载基板,以及前臂驱动构件,该前臂驱动构件刚性地联接至悬臂连杆并具有延伸穿过上臂连杆的前臂驱动元件。壳体,前臂驱动元件连接到前臂连杆壳体的从动构件。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号