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首页> 外文期刊>Romanian journal of physics >Ⅰ. ULTRA-HIGH VACUUM SCANNING TUNNELING MICROSCOPE: THE MICROSCOPE VIBRATION DAMPING SYSTEM AND MICROSCOPE VACUUM STATION
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Ⅰ. ULTRA-HIGH VACUUM SCANNING TUNNELING MICROSCOPE: THE MICROSCOPE VIBRATION DAMPING SYSTEM AND MICROSCOPE VACUUM STATION

机译：Ⅰ。超高真空扫描隧道显微镜：显微镜振动阻尼系统和显微镜真空站

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摘要

The aim was the construction of the first scanning tunneling microscope (STM) at the Technical University of Munich. For maximum flexibility, the new instrument has been designed as a multipurpose STM for operating in ultra-high vacuum (UHV) or in air (even in intermediate pressures and in the presence of corrosive gases, like organometallic compounds), has been targeted at expanding the convenience, accuracy and flexibility of a computerized system to a fast scanning microscope, with set-currents ranging from pA to mA, very useful for nanofabrication and tunneling spectro-scopy. The physical and mechanical design of the microscope vibration damping system and the microscope vacuum station is discussed in details. A mechanical stability much better than 0.01 A has been estimated, stability which allows a vertical resolution of about 0.1 A and a lateral resolution better than 2 A, resolutions which are very well supported by measurements showing a nice atomic resolution obtained even in air on highly oriented pyrolytic graphite. The vacuum station design allows beside UHV scanning tunneling microscopy measurements additional UHV experiments in the same UHV-chamber.
机译：目的是在慕尼黑工业大学建造第一台扫描隧道显微镜（STM）。为了获得最大的灵活性，新仪器被设计为多功能STM，可在超高真空（UHV）或空气中运行（即使在中等压力下以及存在腐蚀性气体（如有机金属化合物）的情况下）也已针对扩展快速扫描显微镜的计算机系统的方便性，准确性和灵活性，其设定电流范围从pA到mA，对于纳米加工和隧道光谱非常有用。详细讨论了显微镜减振系统和显微镜真空台的物理和机械设计。估计机械稳定性大大优于0.01 A，稳定性允许垂直分辨率约为0.1 A，横向分辨率优于2 A，这些分辨率得到了很好的支持，即使在高空气中在空气中也能获得良好的原子分辨率取向热解石墨。真空站设计允许在超高压扫描隧道显微镜测量之外在同一超高压室中进行其他超高压实验。

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  • 来源
    《Romanian journal of physics》 |1995年第3期|p.229-239|共11页
  • 作者

    M. ENACHESCU;

  • 作者单位

    Physics Department, University of Bucharest, P. O. Box MG-11, Bucharest, Romania;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 物理学;
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