A micromechanical bridge-shaped voltage-controlled oscillator

HAN Jianqiang; ZHU Changchun; ZHAO Hongpo

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A micromechanical bridge-shaped voltage-controlled oscillator

机译：微机械桥形压控振荡器

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摘要

A novel micromechanical bridge-shaped voltage-controlled oscillator with high Q value was fabricated. The core of this kind of oscillators is an electrothermally excited and piezoresistively detected micromechanical bridge resonator. Its resonance frequency can be adjusted by changing the DC voltage applied to the wheatstone bridge. Theoretical analysis and experimental data show that its resonance frequency is linear with the square of the DC voltage. The linearity is better than 0.16 percent and the adjustable frequency range excels 17.15 percent.

机译：制备了一种新型的高Q值的微机械桥形压控振荡器。这种振荡器的核心是电热激发和压阻检测的微机械桥谐振器。可以通过改变施加到惠斯通电桥的直流电压来调节其谐振频率。理论分析和实验数据表明，其谐振频率与直流电压的平方成线性关系。线性度优于0.16％，可调频率范围优于17.15％。

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来源
《Science in China. Series E, Technological sciences》 |2004年第1期|p.26-32|共7页
作者
HAN Jianqiang; ZHU Changchun; ZHAO Hongpo;
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作者单位

Xian Jiaotong University, Xian 710049, China;

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原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
voltage-controlled oscillator; microbridge; resonator; MEMS;

机译：压控振荡器;微桥;谐振器;MEMS;

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A micromechanical bridge-shaped voltage-controlled oscillator

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