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首页> 外文期刊>Science in China. Series E, Technological sciences >Processing technique of target capsule's micro inflation hole with a scanning probe
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Processing technique of target capsule's micro inflation hole with a scanning probe

机译：用扫描探针处理目标胶囊微膨胀孔的技术

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摘要

To resolve inflation of inertial confinement fusion (lCF) target and encapsulation of micro inflation hole with adhesive, a scanning probe microscope (SPM) diamond microprobe was used as the cutting tool with SPM in contact mode Some parameters influencing the quality of micro inflation hole, such as the scanning direction of the diamond tip, the scanning rate and the contact force are discussed. Accurate taper hole was achieved whose dimension and precision could meet the requirements of inflation and encapsulation technique of micro hole. The experimental results show that using SPM diamond microprobe as the cutting tool and with special processing technique, the precision machining of target capsule's taper inflation hole can be realized A novel operative technology for filling high Z gas to target is provided.
机译：为了解决惯性约束聚变（lCF）目标的膨胀和用粘合剂封装微膨胀孔的问题，使用扫描探针显微镜（SPM）金刚石微探针作为SPM接触方式的切削工具，一些影响微膨胀孔质量的参数，讨论了金刚石尖端的扫描方向，扫描速度和接触力。获得了精确的锥孔，其尺寸和精度可以满足微孔的膨胀和包封技术的要求。实验结果表明，采用SPM金刚石微探针作为切削工具，并采用特殊的加工技术，可以实现靶胶囊锥形充胀孔的精密加工。提供了一种将高Z气体充填到靶上的新型操作技术。

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