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Ion-assisted e-beam evaporated gas sensor for environmental monitoring

机译：离子辅助电子束蒸发气体传感器，用于环境监测

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With increasing air pollution problems, gas sensors for toxic gas detection have recently gained much attention. Among different types of gas sensors, thin film devices have been much of interest because of microelectronic batch-fabricated compatibility, reproducibility, and the ability to form multilayer device structures. In this work, thin film based gas sensors fabricated by electron beam evaporation with ion-assisted deposition (IAD) are developed for immediate applications of CO detection for environmental monitoring and Alcohol testing for drivers. The IAD process offers several advantages for gas sensor fabrication, including reactive deposition for gas-sensitive metal-oxide material optimization and improved thin film adhesion for better device reliability. Gas-sensing performance of ion-assisted electron beam evaporated metal oxide thin film materials, including SnO_2 and WO_3, has been characterized as a function of IAD deposition parameters. The metal oxide layer was deposited on Au/Al interdigitated electrodes on alumina or glass substrates with an unpatterned NiCr thin film heater on the backside. The sensors were tested with reducing gases, including alcohol vapour and CO, in the temperature range between 200 and 350℃. Experimental results indicate that the SnO_2 thin film has higher sensitivity to both alcohol and CO than the WO_3 thin lilm under the same IAD deposition parameters. In addition, alcohol and CO sensitivity tends to improve with increased oxygen-ion addition during e-beam evaporation. Our results indicate that ion-assisted e-beam evaporation is a useful and well-controlled process suitable lor gas sensor fabrication.
机译：随着越来越多的空气污染问题，用于有毒气体检测的气体传感器近来引起了很多关注。在不同类型的气体传感器中，由于微电子分批制造的兼容性，可重复性以及形成多层器件结构的能力，薄膜器件引起了人们的极大兴趣。在这项工作中，开发了通过电子束蒸发和离子辅助沉积（IAD）制造的基于薄膜的气体传感器，用于将CO检测用于环境监测和驾驶员酒精检测的即时应用。 IAD工艺为气体传感器制造提供了多个优势，包括用于气敏性金属氧化物材料优化的反应沉积以及改善的薄膜粘附性，从而提高了设备​​的可靠性。离子辅助电子束蒸发的金属氧化物薄膜材料（包括SnO_2和WO_3）的气敏性能已被表征为IAD沉积参数的函数。将金属氧化物层沉积在氧化铝或玻璃基板上的Au / Al叉指电极上，背面使用无图案的NiCr薄膜加热器。在200至350℃的温度范围内，对传感器进行了还原性气体测试，包括乙醇蒸气和一氧化碳。实验结果表明，在相同的IAD沉积参数下，SnO_2薄膜对醇和CO的敏感性均高于WO_3薄膜。此外，在电子束蒸发过程中，随着氧离子添加量的增加，酒精和一氧化碳的敏感性趋于提高。我们的结果表明，离子辅助电子束蒸发是一种有用且控制良好的过程，适用于气体传感器的制造。

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