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Pulsed Fiber Laser 'SumiLas*1' for Micro-Processing

机译：用于微加工的脉冲光纤激光器“ SumiLas * 1”

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摘要

In order to meet requirements in the next generation micro-processing, we have developed a 1.06um pulsed fiber laser employing a MOPA (master oscillator power amplifier) configuration. This laser features broad pulse width flexibility (100ps to 20ns), excellent beam quality (M~2S1.3), and a wide range of pulse repetition frequencies (50kHz to 1MHz). With these attributes of the laser, the optimum pulse width for P1 processing both (a)-Si (amorphous silicon) and CIS or CulnSe (copper indium diselenide) types of solar cells was studied. As a result, it was found that the pulse width of 10 to 20ns gives the best scribing quality on (a)-Si solar cells while the pulse width around 500ps leads to excellent results for CIS samples. The scanning speeds of 2500mm/s and 5000mm/s have been achieved for (a)-Si and CIS samples, respectively. In this study, surface texturing of STAVAX, a through-hardening stainless steel for plastic molding, was also conducted. The surface roughness and water repellency on the STAVAX surface were controlled by adjusting the pulse width, number of scanning and assist gas condition. 【keyworks】 laser;pulse;micro-processing;solar cell;texturing
机译：为了满足下一代微处理的要求，我们开发了采用MOPA（主振荡器功率放大器）配置的1.06um脉冲光纤激光器。该激光器具有宽的脉冲宽度灵活性（100ps至20ns），出色的光束质量（M〜2S1.3）和宽范围的脉冲重复频率（50kHz至1MHz）。利用激光器的这些属性，研究了用于P1处理（a）-Si（非晶硅）和CIS或CuInSe（铜铟二硒化物）类型的太阳能电池的最佳脉冲宽度。结果发现，在（a）-Si太阳能电池上10至20ns的脉冲宽度可提供最佳划线质量，而500ps左右的脉冲宽度可为CIS样品提供出色的结果。 （a）-Si和CIS样品的扫描速度分别达到2500mm / s和5000mm / s。在这项研究中，还对STAVAX（一种用于塑料成型的全硬化不锈钢）进行了表面纹理化处理。通过调节脉冲宽度，扫描次数和辅助气体条件来控制STAVAX表面的表面粗糙度和疏水性。 【主要工作】激光；脉冲；微加工；太阳能电池；纹理

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  • 来源
    《SEI Technical Review》 |2011年第72期|p.127-134|共8页
  • 作者

    Motoki KAKUI; Shinobu TAMAOKI; Yasuomi KANEUCHI; Hiroshi KOHDA; Yuji TANAKA; Yasuhiro OKAMOTO; Yoshiyuki UNO; Brian BAIRD;

  • 作者单位

    Manager, Optical Components R&D De-partment, Optical Communications R&D Laboratories;

    Optical Components R&D Department, Optical Com-munications R&D Laboratories;

    Assistant Manager, Optical Components R&D Depart-ment, Optical Communications R&D Laboratories;

    Assistant Manager, Optical Components R&D Depart-ment, Optical Communications R&D Laboratories;

    Okayama University Graduate School of Natural Sci-ence and Technology;

    Assistant Professor, Okayama University GraduateSchool of Natural Science and Technology;

    Professor, Okayama University Graduate School of Nat-ural Science and Technology;

    Managing Director, Summit Photonics LLC.;

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