Effects of Ohmic Resistance on Dynamic Characteristics and Impedance of Micro/Nano Cantilever Beam resonators

Ghader Rezazadeh; Aliasghar Keyvani; Morteza H. Sadeghi; Manouchehr Bahrami

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Effects of Ohmic Resistance on Dynamic Characteristics and Impedance of Micro/Nano Cantilever Beam resonators

机译：欧姆电阻对微纳纳米悬臂梁谐振器动态特性和阻抗的影响

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Effects of Ohmic resistance on MEMS/NEMS vibrating structures that have always been dismissed in some situations may cause important changes in resonance properties and impedance parameters of the MEMS/NEMS based circuits. In this paper it is aimed to present a theoretical model to precisely investigate the problem on a simple cantilever-substrate resonator. In this favor the Ohm's current law and charge conservation law have been merged to find a differential Equation for voltage propagation on the beam and because mostly nano structures are expected as the scope of the problem, modified couple stress theory is used to formulate the dynamic motion of the beam. The two governing equations were coupled and both nonlinear that have been solved simultaneously using a Galerkin based state space formulation. The obtained results that are in exact agreement with previous works show that dynamic pull-in voltage, switching time, and impedance of structure as a MEMS capacitor especially in frequencies higher than natural resonance frequency strongly relay on electrical resistance of the beam and substrate material.

机译：在某些情况下始终无法消除的欧姆电阻对MEMS / NEMS振动结构的影响可能会导致基于MEMS / NEMS的电路的谐振特性和阻抗参数发生重大变化。本文旨在提供一个理论模型来精确研究简单悬臂基板谐振器上的问题。在这个有利条件下，欧姆电流定律和电荷守恒定律被合并以找到一个用于束上电压传播的微分方程，并且由于大多数纳米结构被认为是问题的范围，因此采用了改进的耦合应力理论来描述动态运动。光束使用基于Galerkin的状态空间公式同时解决了两个控制方程和两个非线性方程。获得的结果与以前的工作完全吻合，表明动态吸合电压，开关时间和结构的阻抗，尤其是在高于自然共振频率的频率下，作为MEMS电容器，强烈依赖于梁和衬底材料的电阻。

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来源
《Sensing and imaging》 |2013年第2期|1-12|共12页
作者
Ghader Rezazadeh; Aliasghar Keyvani; Morteza H. Sadeghi; Manouchehr Bahrami;
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作者单位

Mechanical Engineering Department, Urmia University, Urmia, Iran;

Mechanical Engineering Faculty, University of Tabriz, Tabriz, Iran;

Mechanical Engineering Faculty, University of Tabriz, Tabriz, Iran;

Electrical Engineering Faculty, University of Tabriz, Tabriz, Iran;

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正文语种 eng
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关键词
Microelectromechanical systems (MEMS); Cantilever beam resonator; Ohmic resistance; Voltage distribution;

机译：微机电系统（MEMS）;悬臂梁谐振器;欧姆电阻;电压分布;

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专利

1. Effects of Ohmic Resistance on Dynamic Characteristics and Impedance of Micro/Nano Cantilever Beam resonators [J] . Ghader Rezazadeh, Aliasghar Keyvani, Morteza H. Sadeghi, Sensing and Imaging: An International Journal . 2013,第1a2期

机译：欧姆电阻对微纳纳米悬臂梁谐振器动态特性和阻抗的影响
2. Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses [J] . Bouchaala Adam, Nayfeh Ali H., Younis Mohammad I. Journal of Dynamic Systems, Measurement, and Control . 2016,第9期

机译：由于增加了质量，微和纳米悬臂梁谐振器的频移
3. Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection [J] . Ya-Chi Cheng, Chi-Jia Tong, Ming-Tzer Lin Microsystem Technologies . 2011,第4期

机译：微米和纳米级金属薄膜的静态和动态力学性能的测量：使用微悬臂梁偏转
4. 3-D Surface Profilometry for Both Static and Dynamic Nano-scale Full Field Characterization of AFM Micro Cantilever Beams [C] . Laing-Chia Chen, Kuang-Chao Fan, Chi-Duen Lin, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II . 2005

机译：用于AFM微悬臂梁的静态和动态纳米级全场表征的3-D表面轮廓仪
5. Thermoreflectance Technique for Thermal Properties Measurement of Micro/Nanoscale Cantilever Beams [D] . Elahi, Mirza Mohammad Mahbube. 2017

机译：用于微/纳米悬臂梁热性能测量的热反射技术
6. Energy losses of nanomechanical resonators induced by atomic force microscopy-controlled mechanical impedance mismatching [O] . Johannes Rieger, Andreas Isacsson, Maximilian J. Seitner, -1

机译：原子力显微镜控制的机械阻抗失配引起的纳米机械谐振器能量损失
7. Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam [O] . Bhushan, A., Inamdar, M. M., Pawaskar, D. N. 2011

机译：残余应力对土的静动力特性的影响静电驱动的Nanobeam
8. Frequency Dependent Characteristic Impedance, Attenuation, and OHMIC Loss of Microstrip, Based upon Numerical Calculations of Effective Inductance [R] . McConnell, P. J., Brooke, R. L. 1981

机译：基于有效电感数值计算的微带频率相关特性阻抗，衰减和OHmIC损耗

Effects of Ohmic Resistance on Dynamic Characteristics and Impedance of Micro/Nano Cantilever Beam resonators

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