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Chemicapacitive microsensors for chemical warfare agent and toxic industrial chemical detection

机译：用于化学战剂和有毒工业化学物质检测的化学相容性微传感器

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摘要

Detection of chemical warfare agents and toxic industrial chemicals using Microfabrication and microelectromechanical systems (MEMS) chemicapactive sensors is described. Our sensor chips consist of 10 parallel plates or interdigitated capacitors with an absorbant dielectric material to measure the dielectric constant of an array of selectively absorbing materials. The dielectric permittivity of these polymer filled chemicapacitors changes upon adsorption and desorption of the chemical vapors. Gaseous analytes including chemical warfare agents (CWAs) and toxic industrial chemicals (TICs) have been exposed to our sensors with the results being displayed and discussed below. Sensor performance was characterized through exposure to various CWAs and TICs over a range of concentrations. The limits of detection (LOD) were determined for several chemicals.
机译：描述了使用微细加工和微机电系统（MEMS）化学活性传感器检测化学战剂和有毒工业化学品。我们的传感器芯片由10个平行板或叉指电容器以及吸收性电介质材料组成，以测量选择性吸收材料阵列的介电常数。这些聚合物填充的化学电容器的介电常数随化学蒸气的吸附和解吸而变化。包括化学战剂（CWA）和有毒工业化学品（TIC）在内的气态分析物已暴露于我们的传感器中，结果在下面显示和讨论。通过暴露于各种浓度的各种CWA和TICs来表征传感器性能。确定了几种化学物质的检出限（LOD）。

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