Hydrogel-based piezoresistive pH sensors: Design, simulation and output characteristics

Quang Thong Trinh; Gerald Gerlach; Joerg Sorber; Karl-Friedrich Arndt

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Hydrogel-based piezoresistive pH sensors: Design, simulation and output characteristics

机译：基于水凝胶的压阻pH传感器：设计，仿真和输出特性

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The paper summarizes a detailed design study of silicon piezoresistive pH sensors, whose operation relies on the pH sensitive swelling of a polymer hydrogel. It is based on an analytical model of the hyperelastic-viscous behaviour of hydrogel. The pH sensor behaviour was investigated by simulating and measuring the silicon membrane deflection and the stress inside the membrane. Simulation was performed using finite element method (ANSYS). A technology to manufacture such hydrogel-based sensors was developed. We found satisfying agreement between simulation and measured results for the sensor output characteristics.

机译：本文总结了硅压阻pH传感器的详细设计研究，该传感器的操作取决于聚合物水凝胶对pH敏感的溶胀。它基于水凝胶的超弹性-粘性行为的分析模型。通过模拟和测量硅膜的挠度和膜内部的应力来研究pH传感器的性能。使用有限元方法（ANSYS）进行仿真。开发了制造这种基于水凝胶的传感器的技术。我们发现传感器输出特性的仿真结果与测量结果之间令人满意的一致性。

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来源
《Sensors and Actuators. B, Chemical》 |2006年第1期|p.17-26|共10页
作者
Quang Thong Trinh; Gerald Gerlach; Joerg Sorber; Karl-Friedrich Arndt;
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作者单位

Institute for Solid-State Electronics, Dresden University of Technology, Helmholtzstr. 18, 01062 Dresden, Germany;

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原文格式 PDF
正文语种 eng
中图分类自动化元件、部件;
关键词
piezoresistive sensor; pH sensitive hydrogel; pH sensor; FEM;

机译：压阻传感器;pH敏感水凝胶;pH传感器;有限元;

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2. Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio [J] . Bae B, Flachsbart BR, Park K, Journal of Micromechanics and Microengineering . 2004,第12期

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3. Design and simulation of a high sensitive stripped-shaped piezoresistive pressure sensor [J] . Farhath Maliha, Samad Mst. Fateha Journal of Computational Electronics . 2020,第1期

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4. Hydrogel-based Piezoresistive pH Sensors: Modeling, Simulation and Experimental Verification [C] . Q. Thong Trinh, M. Guenther, J. Sorber, Electronic Systemintegration Technology Conference . 2006

机译：基于水凝胶的压阻性pH传感器：建模，仿真和实验验证
5. Design, simulation and fabrication of piezoresistive pressure sensors on flexible substrates. [D] . Shamanna, Vinayak K. 2005

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6. Evaluation of Nine Consensus Indices in Delphi Foresight Research and Their Dependency on Delphi Survey Characteristics: A Simulation Study and Debate on Delphi Design and Interpretation [O] . Stanislav Birko, Edward S. Dove, Vural Özdemir -1

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7. Output characteristics of silicon piezoresistive pH sensors based on polymer hydrogel: simulations and experiments [O] . Trinh Quang Thong, Sorber Jorge, Gerlach Gerald 2011

机译：基于聚合物水凝胶的硅压阻pH传感器的输出特性：模拟和实验

Hydrogel-based piezoresistive pH sensors: Design, simulation and output characteristics

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