A highly sensitive gas-sensing platform based on a metal-oxide nanowire forest grown on a suspended carbon nanowire fabricated at a wafer level

著录项

• 来源
  《Sensors and Actuators》 |2018年第5期|55-62|共8页
• 作者

  Yeongjin Lim; Soosung Kim; Yeong Min Kwon; Jeong Min Baik; Heungjoo Shin;

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• 作者单位

  School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST);

  Department of Mechanical engineering, Ulsan National Institute of Science and Technology (UNIST);

  School of Materials Science and Engineering, KIST-UNIST-Ulsan Center for Convergent Materials, Ulsan National Institute of Science and Technology (UNIST);

  School of Materials Science and Engineering, KIST-UNIST-Ulsan Center for Convergent Materials, Ulsan National Institute of Science and Technology (UNIST);

  Department of Mechanical engineering, Ulsan National Institute of Science and Technology (UNIST);

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Metal-oxide nanowire forest; Suspended architecture; Carbon nanowire; Gas sensor; Carbon-MEMS;

  机译：金属氧化物纳米线森林;悬浮架构;碳纳米线;气体传感器;碳微机电系统;