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首页> 外文期刊>Sensors Journal, IEEE >Electrical Characteristics of Doped Silicon Nanowire Channel Field-Effect Transistor Biosensors
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Electrical Characteristics of Doped Silicon Nanowire Channel Field-Effect Transistor Biosensors

机译:掺杂硅纳米线沟道场效应晶体管生物传感器的电学特性

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摘要

Optimization of operation conditions for biosensing is investigated for the doped silicon nanowire channel transistor sensors. Sensors with phosphorus doped honeycomb nanowire channel are fabricated on 8-in wafer using the conventional CMOS technology. From the low frequency noise characteristics, the noise equivalent gate voltage fluctuation is obtained to evaluate the sensor resolution and optimize the operation condition. The sensor exhibits maximum resolution at the flat band voltage condition. Detection of a neurotransmitter, dopamine, is demonstrated using the fabricated devices, showing a detection limit of 1 fM and a sensitivity of 2.3 mV/log[dopamine] with a resolution of ~60 levels/log[dopamine].
机译:研究了用于掺杂硅纳米线沟道晶体管传感器的生物传感操作条件的优化。使用常规CMOS技术在8英寸晶圆上制造具有磷掺杂蜂窝纳米线通道的传感器。根据低频噪声特性,获得噪声等效栅极电压波动,以评估传感器分辨率并优化操作条件。传感器在平带电压条件下表现出最大的分辨率。使用制造的设备演示了对神经递质多巴胺的检测,检测限为1 fM,灵敏度为2.3 mV / log [多巴胺],分辨率约为60水平/ log [dopamine]。

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  • 来源
    《Sensors Journal, IEEE》 |2017年第3期|667-673|共7页
  • 作者单位

    Department of Creative IT Engineering, Future IT Innovation Laboratory, Pohang University of Science and Technology, Pohang, South Korea;

    Department of Creative IT Engineering, Future IT Innovation Laboratory, Pohang University of Science and Technology, Pohang, South Korea;

    Department of Creative IT Engineering, Future IT Innovation Laboratory, Pohang University of Science and Technology, Pohang, South Korea;

    Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, South Korea;

    Department of Creative IT Engineering, Future IT Innovation Laboratory, Pohang University of Science and Technology, Pohang, South Korea;

    Department of Creative IT Engineering, Future IT Innovation Laboratory, Pohang University of Science and Technology, Pohang, South Korea;

    NASA Ames Research Center, Moffet Field, CA, USA;

    Department of Creative IT Engineering, Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, South Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Sensor phenomena and characterization; Logic gates; Silicon; Field effect transistors; Biosensors;

    机译:传感器现象与表征逻辑门硅场效应晶体管生物传感器;

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