...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Sensors Journal, IEEE >Optical MEMS Pressure Sensors Incorporating Dual Waveguide Bragg Gratings on Diaphragms
【24h】

Optical MEMS Pressure Sensors Incorporating Dual Waveguide Bragg Gratings on Diaphragms

机译：光学MEMS压力传感器在膜片上集成了双波导布拉格光栅

获取原文
获取原文并翻译 | 示例
   

获取外文期刊封面封底 >>

       
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The wavelength shift of single Bragg grating integrated into a waveguide in optical MEMS pressure sensors gives inaccurate result due to the cross sensitivity caused by multiple external factors including temperature. Novel dual waveguide Bragg gratings (WBGs)-based microelectromechanical system pressure sensors with silicon micromachined diaphragm are presented here. The sensor consists of a curved waveguide with two identical WBGs located on the diaphragm. When pressure is applied on the diaphragm, the pitch of the gratings changes, and hence, there is a shift in the corresponding Bragg wavelength. The effect of temperature is assumed to be the same for both the gratings. As temperature shifts the Bragg wavelength of the two gratings equally, the error due to the temperature change on pressure sensitivity is eliminated. This method of pressure measurement effectively cancels out the temperature sensitivity. Three different configurations of the sensor with circular, square, and rectangular diaphragms are designed and simulated using COMSOL Multiphysics. Pressure sensitivity for the circular diaphragm configuration is found to be 2.1 and 0.744 pm/Pa for the two gratings, which are higher than the square and rectangular diaphragm configuration. Hence, the circular diaphragm configuration is better suited for multiplexing. The temperature independent properties of the sensors as well as the adjustability of sensitivity and measurement range by means of altering the dimensions of the sensors are studied. The temperature sensitivity is the same for both the gratings and is found to be 11.6 ppm/°C. Using modulation techniques and suitable designs, these sensors find applications in remote distributed sensing.
机译：由于包括温度在内的多种外部因素引起的交叉灵敏度，集成到光学MEMS压力传感器中的波导中的单个布拉格光栅的波长偏移给出的结果不准确。本文介绍了基于新型双波导布拉格光栅（WBGs）的微机电系统压力传感器，具有硅微机械隔膜。传感器由一个弯曲的波导组成，在膜片上有两个相同的WBG。当在膜片上施加压力时，光栅的间距会发生变化，因此相应的布拉格波长会发生偏移。假设温度对两个光栅的影响相同。当温度使两个光栅的布拉格波长平均移动时，消除了由于温度变化引起的压力敏感性误差。这种压力测量方法有效地抵消了温度敏感性。使用COMSOL Multiphysics设计和模拟了具有圆形，方形和矩形膜片的传感器的三种不同配置。对于两个光栅，圆形光阑配置的压力敏感度分别为2.1和0.744 pm / Pa，高于方形和矩形光阑配置。因此，圆形光圈配置更适合多路传输。通过改变传感器的尺寸，研究了传感器的温度独立特性以及灵敏度和测量范围的可调性。两个光栅的温度灵敏度相同，发现为11.6 ppm /°C。通过使用调制技术和适当的设计，这些传感器可在远程分布式传感中找到应用。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号