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首页> 外文期刊>Sensors Journal, IEEE >Post Annealing Performance Evaluation of Printable Interdigital Capacitive Sensors by Principal Component Analysis
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Post Annealing Performance Evaluation of Printable Interdigital Capacitive Sensors by Principal Component Analysis

机译：基于主成分分析的可印刷叉指式电容传感器的退火后性能评估

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摘要

The surface roughness of thin-film gold electrodes induces instability in impedance spectroscopy measurements of capacitive interdigital printable sensors. Post-fabrication thermodynamic annealing was carried out at temperatures ranging from 30 °C to 210 °C in a vacuum oven and the variation in surface morphology of thin-film gold electrodes was observed by scanning electron microscopy. Impedance spectra obtained at different temperatures were translated into equivalent circuit models by applying complex nonlinear least square curve-fitting algorithm. Principal component analysis was applied to deduce the classification of the parameters affected due to the annealing process and to evaluate the performance stability using mathematical model. Physics of the thermodynamic annealing was discussed based on the surface activation energies. The post anneal testing of the sensors validated the achieved stability in impedance measurement.
机译：薄膜金电极的表面粗糙度在电容式叉指可印刷传感器的阻抗谱测量中引起不稳定性。在真空烘箱中于30℃至210℃的温度下进行制造后的热力学退火，并通过扫描电子显微镜观察薄膜金电极的表面形态的变化。通过应用复杂的非线性最小二乘曲线拟合算法，将在不同温度下获得的阻抗谱转换为等效电路模型。应用主成分分析来推断归因于退火过程的参数的分类，并使用数学模型评估性能稳定性。基于表面活化能讨论了热力学退火的物理过程。传感器的退火后测试验证了阻抗测量的稳定性。

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