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首页> 外文期刊>Sensors Journal, IEEE >Ultra-Low-Noise Seismic Piezoelectric Accelerometer With Integral FET Amplifier
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Ultra-Low-Noise Seismic Piezoelectric Accelerometer With Integral FET Amplifier

机译：具有集成FET放大器的超低噪声地震压电加速度计

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摘要

The design of a seismic piezoelectric (PE) accelerometer with integral electronics (IEPE) having probably the lowest noise floor (for its size and weight) and lowest (near-dc) operating frequencies ever reported to date among this type of sensors is presented. The accelerometer frequency range is from 0.003 to 200 Hz at the ±3 dB level. The noise floor (equivalent input noise acceleration) is about 600, 55, 37, 7 and 3 nG/√(Hz) at frequencies 0.1, 0.5, 1, 10 and 100 Hz, respectively. The sensor incorporates the ultra-low-noise FET-input charge amplifier and the PE transducer operated in the flexural, circular bender bimorph mode. Key factors for low-noise operation are discussed. The contribution of the PE transducer noise and charge amplifier noise is shown at a frequency range from 0.1 to 200 Hz. In addition to ultra-low-noise and near-dc frequency response, the designed accelerometer has other parameters impressive for the seismic IEPE sensors: output impedance ≤ 10 Ω, 100°C maximum operating temperature and 250 G pk shock limit. The sensor''s noise floor was measured directly at the National Institute of Standards and Technology (NIST). The experimental results have good correlation with the noise values evaluated based on the measured charge amplifier noise and the theoretical PE transducer thermal noise. The ultra-low-noise floor of the designed sensor allowed using it in the stabilization platform, which carries the world''s most frequency stable laser system used for the atomic clock research conducted by NIST.
机译：提出了一种带有集成电子器件（IEPE）的地震压电（PE）加速度计的设计，该传感器迄今为止在此类传感器中可能具有最低的本底噪声（就其尺寸和重量而言）和最低的（近直流）工作频率。加速度计的频率范围为±3 dB，范围为0.003至200 Hz。在频率0.1、0.5、1、10和100 Hz时，本底噪声（等效输入噪声加速度）分别约为600、55、37、7和3 nG /√（Hz）。该传感器集成了超低噪声FET输入电荷放大器和以弯曲，圆形弯曲双压电晶片模式运行的PE传感器。讨论了低噪声运行的关键因素。在0.1至200 Hz的频率范围内，显示了PE换能器噪声和电荷放大器噪声的影响。除了超低噪声和近直流频率响应外，设计的加速度计还具有其他地震IEPE传感器令人印象深刻的参数：输出阻抗≤10Ω，最高工作温度100°C和250 G pk冲击极限。传感器的本底噪声直接在美国国家标准技术研究院（NIST）进行测量。实验结果与根据测得的电荷放大器噪声和理论PE换能器热噪声评估的噪声值具有良好的相关性。所设计传感器的超低噪声底板允许在稳定平台中使用它，该平台装有世界上频率最稳定的激光系统，用于NIST进行的原子钟研究。

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