...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Sensors Journal, IEEE >Micromachined GaAs MMIC-Based Spiral Inductors With Metal Shores and Patterned Ground Shields
【24h】

Micromachined GaAs MMIC-Based Spiral Inductors With Metal Shores and Patterned Ground Shields

机译：基于GaAs MMIC的微加工螺旋电感，带有金属支撑和图案化接地屏蔽

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This paper presents micromachined GaAs monolithic microwave integrated circuits (MMIC)-based radio frequency (RF) planar spiral inductors with metal shores (MS) and patterned ground shields (PGS). The inductors are fabricated using a GaAs MMIC process without any additional step. MS and PGS are located and inserted between the planar spiral inductors and the GaAs substrate respectively for depressing substrate losses. To further improve its performance, the backside substrate of each inductor is processed to form the membrane structure by the via-hole etching technology. Based on the parameter extraction about a single-ended method, the characteristics of two-type RF spiral inductors (3.5- and 4.5-turn) are investigated. The measured quality factor (Q) of 4 nH on-chip spiral MMIC inductors (4.5-turn) with MS and PGS are 13 at 5.8 GHz and 14.2 at 6.6 GHz, respectively. Measurement results demonstrate that the effects of MS and PGS on the Q of MMIC inductors have resulted in the improvement of about 6% and 15%, respectively, and on the inductance and the metal losses are almost constant in interested frequencies. These improved inductors applied to GaAs MMIC-based passive lowpass filters reduce insertion losses of the filters.
机译：本文介绍了基于微加工的GaAs单片微波集成电路（MMIC）的射频（RF）平面螺旋电感器，具有金属肖氏（MS）和图案化接地屏蔽（PGS）。使用GaAs MMIC工艺制造电感器，无需任何其他步骤。 MS和PGS分别定位并插入在平面螺旋电感器和GaAs衬底之间，以降低衬底损耗。为了进一步提高其性能，通过通孔蚀刻技术对每个电感器的背面基板进行处理以形成膜结构。基于单端方法的参数提取，研究了两种类型的RF螺旋电感器（3.5匝和4.5匝）的特性。带有MS和PGS的4 nH片上螺旋MMIC电感（4.5匝）的实测品质因数（Q）在5.8 GHz时为13，在6.6 GHz时为14.2。测量结果表明，MS和PGS对MMIC电感器Q的影响分别提高了6％和15％，并且在感兴趣的频率上电感和金属损耗几乎恒定。这些改进的电感器应用于基于GaAs MMIC的无源低通滤波器，可减少滤波器的插入损耗。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号