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首页> 外文期刊>IEEE sensors journal >Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes
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Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes

机译：细长的触觉传感器，用于深孔和窄孔中的轮廓和粗糙度测量

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摘要

A tactile cantilever sensor is described which was designed for quality assurance of high-aspect ratio microcomponents, e.g., spray holes of diesel injector nozzles. It was constructed as an extremely slender silicon cantilever of 1.5-5 mm in length, 30-200 mum in width, and 25-50 mum in height comprising a silicon probing tip at its free end. Close to its clamping, a piezoresistive strain gauge was integrated for signal read-out. The novel sensor was designed to be operated at high scanning speeds offering a millimeter scanning range at a micrometer lateral resolution and a ten nanometers vertical resolution. Cross sensitivity versus temperature and ambient light referred to vertical tip deflection was below 10 nm during a tactile measurement, which was performed under typical tactile probing conditions, i.e., temperature and light intensity variations of 1 K and 0.1 mW/cm 2, respectively. In form and roughness measurements with calibrated standard artifacts as well as with narrow spray holes of advanced diesel injector nozzles, we demonstrated the potential of slender cantilever sensors for high-aspect-ratio micrometrology.
机译：描述了一种触觉悬臂传感器，其被设计用于质量保证高纵横比的微部件，例如柴油喷射器喷嘴的喷孔。它构造成长度为1.5-5毫米，宽度为30-200毫米，高度为25-50毫米的极其细长的硅悬臂，在其自由端包括一个硅探测尖端。接近其钳位时，集成了一个压阻应变仪以读取信号。这种新颖的传感器被设计为可在高扫描速度下运行，从而在毫米的横向分辨率和十纳米的垂直分辨率下提供毫米范围的扫描范围。在触觉测量期间，相对于温度和环境光的交叉敏感度相对于温度和环境光的垂直尖端偏转低于10 nm，这是在典型的触觉探测条件下进行的，即温度和光强度变化分别为1 K和0.1 mW / cm 2。在通过校准的标准工件以及先进的柴油喷射器喷嘴的狭窄喷孔进行形状和粗糙度测量的过程中，我们证明了细长悬臂传感器在高纵横比微观测量中的潜力。

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