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首页> 外文期刊>IEEE sensors journal >AeroMEMS Wall Hot-Wire Anemometer on Polyimide Substrate Featuring Top Side or Bottom Side Bondpads
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AeroMEMS Wall Hot-Wire Anemometer on Polyimide Substrate Featuring Top Side or Bottom Side Bondpads

机译：带有顶面或底面焊盘的聚酰亚胺基板上的AeroMEMS壁式热线风速计

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摘要

Design, manufacturing, calibration, and basic characterization of a microelectromechanical systems (MEMS) wall hot-wire sensor on a flexible polyimide substrate are presented. A configuration exhibiting bondpads on the top side of the foil, as well as an improved setup featuring a through-foil metallization and bottom side bondpads were established. Both sensor designs make use of a highly sensitive nickel thin-film resistor spanning a reactive ion etched cavity in a polyimide substrate. The polyimide base material enables the sensor to be adapted to curved aerodynamic surfaces, e.g., airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers is avoided. The combination of polyimide''''s low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low-power consumption (≪25 mW). Fluctuations in wall shear stress up to 85 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.166 V/(N/m $^{2}$) is achieved in a wall shear stress range from 0 to 0.72 N/m$^{2}$. The specifically designed through-foil metallization process allows for electrical contacts to be positioned on the backside of the substrate, thus effectively minimizing aerodynamic disturbances.
机译：介绍了在柔性聚酰亚胺基板上的微机电系统（MEMS）壁热线传感器的设计，制造，校准和基本特性。建立了在箔的顶面上表现出接合垫的构造以及具有贯穿金属化和底面接合垫的改进设置。两种传感器设计均使用高灵敏度的镍薄膜电阻器，该电阻器跨过聚酰亚胺基板中的反应离子刻蚀腔。聚酰亚胺基材使传感器能够适应弯曲的空气动力学表面，例如机翼和涡轮叶片。避免了如先前提出的MEMS热线风速计所观察到的空气动力学表面和硅传感器表面曲率的不匹配。聚酰亚胺的低热导率和具有FEM优化尺寸的腔体相结合，可实现极低的功耗（≪25 mW）。在恒温模式下，可以解决高达85 kHz的壁切应力波动。在0到0.72 N / m $ ^ {2} $的壁切应力范围内，平均灵敏度为0.166 V /（N / m $ ^ {2} $）。专门设计的箔金属化工艺可将电触点定位在基板的背面，从而有效地减少了空气动力学干扰。

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