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首页> 外文期刊>IEEE sensors journal >Palladium and Metal-Free Phthalocyanine Bilayer Structures for Hydrogen Detection in the SAW Sensor System Based on Interaction Speed
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Palladium and Metal-Free Phthalocyanine Bilayer Structures for Hydrogen Detection in the SAW Sensor System Based on Interaction Speed

机译:基于相互作用速度的声表面波传感器系统中氢检测的无钯无金属酞菁双层结构

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摘要

Bilayer structures with various thicknesses of metal-free phthalocyanine$(hboxH_2hboxPc)$($sim$80,$sim$120, and$sim$160 nm) but the same thickness of palladium (Pd) ($sim$20 nm), have been studied for hydrogen gas-sensing application at temperatures of$sim$$hbox30 ^circhboxC$and$sim$$hbox50 ^circhboxC$with a method based on interaction speed. The structures were fabricated in two different vacuum deposition processes (first the$hboxH_2hboxPc$film and than the Pd) onto an$hboxLiNbO_3$$Y$- cut$Z$-propagating substrate for the surface acoustic wave (SAW) method and additionally (in these same technological processes) onto a glass substrate with a planar microelectrode array for the simultaneous monitoring of the structure planar resistance. A very good correlation has been observed between these two methods (frequency changes for the SAW method coincide with the decrease of the bilayer structure resistance), especially for higher hydrogen concentrations. Although simultaneous measurements were not always feasible (too great resistance in the samples for the structure with the thinnest$hboxH_2hboxPc$), they can provide information about the acoustoelectric interactions between SAW and charge carriers in the bilayer structure. The interaction speed method is based on the great variance in interaction speeds at various hydrogen concentrations (from 2.5% to 4% in synthetic dry air), even though the amplitude signal reaches almost the same frequency level. For a particular chosen initial interaction time interval, a distinct interaction speed can be distinguished with great resolution (from 7.5 Hz/s for 2.5%$hboxH_2$in air to 29.1 Hz/s for 4% for the structure with 160-nm$hboxH_2hboxPc$and 20-nm Pd). These initial interaction fragments are linear versus time for the investigated medium hydrogen concentrations in synthetic dry air. In the case of the investigated bilayer structures, the interaction speed is higher for the structure with the thinnest$hboxH_2hboxPc$film ($sim$80 nm).
机译:已经研究了具有各种厚度的无金属酞菁$(hboxH_2hboxPc)$($ sim $ 80,$ sim $ 120和$ sim $ 160 nm)但具有相同厚度的钯(Pd)($ sim $ 20 nm)的双层结构。使用基于交互速度的方法在温度为$ sim $$ hbox30 ^ circhboxC $和$ sim $$ hbox50 ^ circhboxC $的温度下进行氢气传感应用。这些结构是通过两种不同的真空沉积工艺(首先是$ hboxH_2hboxPc $薄膜,然后是Pd)在用于表面声波(SAW)方法的$ hboxLiNbO_3 $$ Y $ -cut $ Z $传播基板上制造的,此外,(在这些相同的工艺过程中)将其带到带有平面微电极阵列的玻璃基板上,以同时监测结构的平面电阻。在这两种方法之间已经观察到非常好的相关性(SAW方法的频率变化与双层结构电阻的降低相吻合),尤其是对于较高的氢浓度。尽管同时进行测量并非总是可行的(对于具有最薄$ hboxH_2hboxPc $的结构,样品中的电阻太大),但它们可以提供有关SAW和双层结构中电荷载流子之间声电相互作用的信息。相互作用速度方法是基于各种氢浓度(合成干燥空气中从2.5%到4%)的相互作用速度的巨大差异,即使幅度信号达到几乎相同的频率水平。对于特定的选定初始相互作用时间间隔,可以以很高的分辨率区分不同的相互作用速度(从空气中2.5%$ hboxH_2 $的7.5 Hz / s到160-nm $ hboxH_2hboxPc的结构从49.1%的29.1 Hz / s和20纳米Pd)。对于合成干燥空气中所研究的中等氢浓度,这些初始相互作用片段与时间呈线性关系。在所研究的双层结构的情况下,具有最薄的$ hboxH_2hboxPc $膜($ sim $ 80 nm)的结构的相互作用速度更高。

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