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首页> 外文期刊>Sensors Journal, IEEE >Flexible Capacitive Pressure Sensor Based on PDMS Substrate and Ga–In Liquid Metal
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Flexible Capacitive Pressure Sensor Based on PDMS Substrate and Ga–In Liquid Metal

机译：基于PDMS基板和Ga-In液态金属的柔性电容式压力传感器

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摘要

A novel flexible pressure sensor, based on polydimethylsiloxane (PDMS) and eutectic gallium–indium (EGaIn) liquid metal, was developed for detecting various applied pressures. The sensor was fabricated with PDMS polymer-based electrode channels that are filled with EGaIn liquid metal. The liquid metal-based electrodes were designed to form four capacitors (C1, C2, C3, and C4). Conventional printed circuit board technology was used to manufacture the master mold to form the PDMS-based electrode channels. Corona discharge treatment was employed to bond the PDMS layers at room temperature, under atmospheric pressure. The capability of the fabricated pressure sensor was demonstrated by investigating the capacitive-based response of the device for varying applied pressures. Average capacitance changes ranging from 2.3% to 12.0%, 2.6% to 11.8%, 2.5% to 12.2%, and 2.7% to 13.1% when compared with the based capacitance of 14.1, 15.1, 13.8, and 13.3 pF were obtained for C1, C2, C3, and C4, respectively, for applied pressures ranging from 0.25 to 1.10 MPa. A linear relationship was obtained for the average capacitance change with a sensitivity of 0.11%/MPa and a correlation coefficient of 0.9975. The results obtained thus demonstrate the feasibility of employing liquid metal-based electrodes for the fabrication of flexible pressure sensing devices.
机译：一种基于聚二甲基硅氧烷（PDMS）和共晶镓铟铟（EGaIn）液态金属的新型柔性压力传感器，用于检测各种施加的压力。该传感器是用填充有EGaIn液态金属的PDMS聚合物基电极通道制成的。设计基于液态金属的电极以形成四个电容器（C1，C2，C3和C4）。传统的印刷电路板技术用于制造母模，以形成基于PDMS的电极通道。在室温，大气压下，采用电晕放电处理来粘合PDMS层。通过研究设备在变化的施加压力下基于电容的响应，证明了所制造压力传感器的功能。与基础版相比，平均电容变化范围从2.3％至12.0％，2.6％至11.8％，2.5％至12.2％和2.7％至13.1％在0.25至1.10 MPa的施加压力下，C1，C2，C3和C4的电容分别为14.1、15.1、13.8和13.3 pF。获得平均电容变化的线性关系，灵敏度为0.11％/ MPa，相关系数为0.9975。因此，获得的结果证明了采用液态金属基电极制造柔性压力传感装置的可行性。

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  • 来源
    《Sensors Journal, IEEE》 |2019年第1期|97-104|共8页
  • 作者

    Sam Ali; Dinesh Maddipatla; Binu Baby Narakathu; Amer A. Chlaihawi; Sepehr Emamian; Farah Janabi; Bradley J. Bazuin; Massood Z. Atashbar;

  • 作者单位

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

    Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo, MI, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Electrodes; Pressure sensors; Liquids; Partial discharges; Metals; Corona;

    机译：电极;压力传感器;液体;局部放电;金属;电晕;

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