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首页> 外文期刊>Sensors Journal, IEEE >Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone
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Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone

机译：生物启发的矩形压电MEMS定向麦克风

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摘要

The noise floor of a piezoelectric MEMS directional microphone largely depends on piezoelectric materials and transducer modes. A careful choice of these parameters (piezoelectric materials and transducer modes) can help to significantly improve the difficulties of noise floor. Here, we present a unique diaphragm-based biomimetic MEMS directional microphone having multiple-port sensing schemes. The diaphragm is separated into two wings and supported by two torsional beams, which are hinged to a fixed support as to imitate the unique inter-tympanal feature of the flyOrmia ochracea. In this microphone, the thermal-mechanical noise (Johnson noise) is minimized by adopting aluminium nitride-based piezoelectric sensing. The d33mode is incorporated with a prime focus on sensitivity enhancement which leads to signal-to-noise ratio improvement. Measured directivity patterns of both wings show a strong agreement with the direction of applied acoustic pressure as expected for an ideal bi-directional microphone. The measured noise floor at 1-kHz frequency and overall A-weighted noise floor across the audio frequency are 31.35 dB SPL and 32.5 dBA, respectively, which are quite less than some notable works on directional microphones. The experimental results verify the uniqueness of this work.
机译：压电MEMS定向麦克风的本底噪声在很大程度上取决于压电材料和换能器模式。仔细选择这些参数（压电材料和换能器模式）可以帮助显着提高本底噪声的难度。在这里，我们介绍了一种独特的基于隔膜的仿生MEMS定向麦克风，具有多端口感测方案。隔膜被分成两个翼并由两个扭转梁支撑，该两个扭转梁铰接到固定支架上，以模仿苍蝇的独特鼓膜间特征 n Ormia ochracea n。在此麦克风中，通过采用基于氮化铝的压电感应，可将热机械噪声（约翰逊噪声）降至最低。 d n 33 nmode结合了对提高灵敏度的主要关注，从而提高了信噪比。测得的两个机翼的指向性显示出与理想双向麦克风所期望的施加声压方向强烈一致。在1 kHz频率下测得的本底噪声和整个音频频率上的整体A加权本底噪声分别为31.35 dB SPL和32.5 dBA，这远远低于定向麦克风上的一些著名作品。实验结果证明了这项工作的独特性。

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