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首页> 外文期刊>IEEE sensors journal >Modeling of Grating Assisted Hybrid Plasmonic Filter and Its On-Chip Gas Sensing Application
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Modeling of Grating Assisted Hybrid Plasmonic Filter and Its On-Chip Gas Sensing Application

机译：光栅辅助混合等离子体过滤器的建模及其片上气敏应用

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摘要

A dual-band stop vertical hybrid plasmonic filter based on the silicon nitride fin Bragg grating (FBG) is designed and simulated in the infra-red band. It consists of the two silicon nitride FBGs embedded in the silicon waveguide separated by L-SP spacing. Finite element method-based 3D-COMSOL simulation shows two stop band wavelengths at 1.462 and 1.515 mu m, respectively. Furthermore, its on-chip methane gas sensing application for coal mines is also investigated. The proposed filter-cum-sensor is the complementary metal-oxide-semiconductor compatible demonstrating 856.50-nm/RIU sensitivity, 120-RIU-1 figure of merit, 6.34 x 10(-2) RIU limit of detection, and 0.52-nm/K temperature sensitivity.
机译：设计了基于氮化硅鳍状布拉格光栅（FBG）的双带截止垂直混合等离子体激元滤波器，并在红外波段进行了仿真。它由嵌入在以L-SP间距隔开的硅波导中的两个氮化硅FBG组成。基于有限元方法的3D-COMSOL仿真显示两个阻带波长分别为1.462和1.515μm。此外，还研究了其片上甲烷气体传感技术在煤矿中的应用。拟议的滤光片兼传感器是互补金属氧化物半导体兼容产品，具有856.50-nm / RIU灵敏度，120-RIU-1品质因数，6.34 x 10（-2）RIU检测限和0.52-nm / K温度敏感性。

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