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首页> 外文期刊>IEEE sensors journal >Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement
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Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement

机译：二维流量测量膜基量热MEMS传感器的表征与设计评价

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摘要

This article concerns membrane-based thermoelectric flow sensors that measure both velocity and angle in a plane. The sensor chip was fabricated using a micro-machining process. The chip consists of a heater and four thermopiles embedded in a low-stress silicon nitride membrane. The main application for these devices is measuring the airflow distribution in cooled storage rooms. However, their small size of 2 mm by 2 mm, combined with their high angular resolution of less than 0.5 degrees, opens up a spectrum of various applications. Within this work, different heater and thermopile arrangements are presented and compared with each other to reveal the advantages and disadvantages of each design.
机译：本文涉及基于膜的热电流传感器，其测量平面中的速度和角度。使用微加工过程制造传感器芯片。该芯片由加热器和四个热能嵌入低应力氮化硅膜中。这些设备的主要应用是测量冷却储藏室中的气流分布。然而，它们的体积小为2毫米2 mm，与它们的高角度分辨率相结合小于0.5度，打开了一种各种应用的光谱。在这项工作中，彼此呈现并比较了不同的加热器和热电堆布置，以揭示每个设计的优缺点。

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