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首页> 外文期刊>IEEE sensors journal >A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback
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A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback

机译：基于MEMS的电化学角速度计，具有力平衡的负反馈

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摘要

This paper presents a MEMS based electrochemical angular accelerometer with feedback where the relative movement between the liquid inertial mass and the sensitive microelectrodeswas counter balanced by the feedback force. Theoretical analysis was conducted to model the response of the angular accelerometer with feedback. Both sensitive and feedback electrodes were made based on microfabrication and assembled to form MEMS based electrochemical angular accelerometer with feedback. Device characterization was conducted, locating a sensitivity of 8 V/(rad/s(2)), a bandwidth of 0.0083-8 Hz and a noise level of 6.31 x 10(-7) (rad/s(2))/root Hz. In comparison to previously reported MEMS based electrochemical angular accelerometer without feedback, a significant improvement at low frequencies in 3dB bandwidth (0.0083-8 Hz vs. 0.02-10 Hz) was achieved due to the inclusion of the feedback part. This study can provide a new perspective for the development of electrochemical angular accelerometer, which may be further used in seismic monitoring.
机译：本文介绍了基于MEMS的电化学角加速度计，其反馈，其中液体惯性质量与敏感微电极之间的相对运动由反馈力平衡。进行理论分析以模拟角度加速度计与反馈的响应。敏感和反馈电极都是基于微制造和组装以形成具有反馈的基于MEMS的电化学角加速度计。进行设备表征，定位8V /（rad / s（2））的灵敏度，带宽为0.0083-8 Hz，噪声水平为6.31 x 10（-7）（rad / s（2））/根赫兹。与先前报道的基于MEMS的电化学角度加速度计相比，由于包含反馈部分而实现了3DB带宽中的低频（0.0083-8Hz与0.02-10Hz）的低频改善。该研究可以为开发电化学角加速度计提供新的视角，这可以进一步用于地震监测。

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  • 来源
    《IEEE sensors journal》 |2021年第14期|15972-15978|共7页
  • 作者

    Liang Tian; Wang Junbo; Chen Deyong; Liu Bowen; She Xu; Xu Chao; Qi Wenjie; Agafonov Vadim; Egorov Egor; Chen Jian;

  • 作者单位

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

    Moscow Inst Phys & Technol Ctr Mol Elect Dolgoprudnyi 141701 Russia;

    Moscow Inst Phys & Technol Ctr Mol Elect Dolgoprudnyi 141701 Russia;

    Chinese Acad Sci Aerosp Informat Res Inst State Key Lab Transducer Technol Beijing 100190 Peoples R China|Univ Chinese Acad Sci Sch Elect Elect & Commun Engn Beijing 100049 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Microelectromechanical system; electrochemical angular accelerometer; rotational sensor; interdigitation microelectrode; negative feedback; microfabrication;

    机译：微机电系统;电化学角加速度计;旋转传感器;区间微电极;负反馈;微制造;

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