Celluloid Microenclosure and Microlens Array Fabricated by Suzuki's Universal Microprinting Method and XeF_2 Vapor Etching for Microbial Analysis

Akihiro Matsutani; Ayako Takada

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Celluloid Microenclosure and Microlens Array Fabricated by Suzuki's Universal Microprinting Method and XeF_2 Vapor Etching for Microbial Analysis

机译：铃木的通用微打印方法和XeF_2气相蚀刻法制备的用于微生物分析的赛璐璐微外壳和微透镜阵列

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摘要

We demonstrate the celluloid-based biochip for cell trapping, prepared by Suzuki's universal microprinting (SUMP) method. The structure of 8 x 8 μm~2 micoenclosures consists of a micropillar array with 2 μm spaces between 2-μm-diameter pillars. We succeeded in fabricating the single-cell trap for yeast cells by using the celluloid microenclosure array chip. In addition, we demonstrated the fabrication process of the celluloid microlens array by the SUMP method and XeF_2 vapor etching. By using this celluloid microlens array, we carried out experiments on collecting laser light and observed the focal spots for each microlens. We consider that this simple technique will be very useful for the single-cell isolation and analysis of microbial cells.

机译：我们展示了通过铃木的通用微打印（SUMP）方法制备的用于细胞捕获的基于赛璐oid的生物芯片。 8 x 8μm〜2微型外壳的结构由一个微柱阵列组成，在2μm直径的柱子之间有2μm的间隔。通过使用赛璐ul微外壳阵列芯片，我们成功地为酵母细胞制造了单细胞阱。此外，我们演示了通过SUMP方法和XeF_2气相刻蚀法制作赛璐micro微透镜阵列的过程。通过使用赛璐oid微透镜阵列，我们进行了收集激光的实验，并观察了每个微透镜的焦点。我们认为这种简单的技术对于微生物细胞的单细胞分离和分析将非常有用。

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来源
《Sensors and materials》 |2018年第1期|149-155|共7页
作者
Akihiro Matsutani; Ayako Takada;
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作者单位

Semiconductor and MEMS Processing Division, Technical Department, Tokyo Institute of Technology, 4259 Nagatsuta, Yokohama, Kanagawa 226-8503, Japan;

Biomaterials Analysis Division, Technical Department, Tokyo Institute of Technology, 4259 Nagatsuta, Yokohama, Kanagawa 226-8501, Japan;

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收录信息美国《科学引文索引》(SCI);
原文格式 PDF
正文语种 eng
中图分类
关键词
single-cell isolation; microenclosure; microlens; XeF_2; SUMP method;

机译：单细胞隔离;微外壳微透镜XeF_2;SUMP法;

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1. Interdigitated 50 nm Ti electrode arrays fabricated using XeF_2 enhanced focused ion beam etching [J] . C SANTSCHI, M JENKE, P HOFFMANN Nanotechnology . 2006,第11期

机译：使用XeF_2增强聚焦离子束刻蚀制造的叉指式50 nm Ti电极阵列
2. Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Kohler Illumination by XeF_2 Vapor Etching [J] . Matsutani Akihiro, Sato Mina, Hasebe Koichi, Sensors and materials . 2019,第4a3a期

机译：XeF_2气相刻蚀使用Kohler照明对凹形微镜进行微生物细胞捕获的微细加工
3. Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Kohler Illumination by XeF_2 Vapor Etching [J] . Matsutani Akihiro, Sato Mina, Hasebe Koichi, Sensors and materials . 2019,第4期

机译：使用XEF_2蒸气蚀刻使用Kohler照明微生物细胞捕获微生物的微细胞
4. 128x128-element silicon microlens array fabricated by ion-beam etching for PtSi IRCCD [C] . Xin-Yu Zhang, Huazhong Univ. of Science, Technology, Integrated Optoelectronics II . 1998

机译：PtSi IRCCD离子束刻蚀制备的128x128元素硅微透镜阵列
5. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [O] . F. Zhang, C. Wang, K. Yin, -1

机译：飞秒激光辅助化学刻蚀制造的用于液体折射率传感的准周期凹微透镜阵列
6. Celluloid Microenclosure and Microlens Array Fabricated by SUMP method and XeF2 Vapor Etching for Microbial Analysis [O] . 2018

机译：通过Sump方法和XeF2蒸气蚀刻制造的纤维素微晶和微液体阵列进行微生物分析

Celluloid Microenclosure and Microlens Array Fabricated by Suzuki's Universal Microprinting Method and XeF_2 Vapor Etching for Microbial Analysis

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