A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit

著录项

• 来源
  《Solid-State Circuits, IEEE Journal of》 |2018年第9期|2636-2650|共15页
• 作者

  Yang Zhao; Jian Zhao; Xi Wang; Guo Ming Xia; Qin Shi; An Ping Qiu; Yong Ping Xu;

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• 作者单位

  School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China;

  Department of Electronic Engineering, Tsinghua University, Beijing, China;

  School of Information and Control Engineering, China University of Mining and Technology, Xuzhou, China;

  School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China;

  School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China;

  School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China;

  Department of Electrical and Computer Engineering, National University of Singapore, Singapore;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Gyroscopes; Micromechanical devices; Sensors; Bandwidth; Sensitivity; Demodulation; Circuit stability;

  机译：陀螺仪;微机械设备;传感器;带宽;灵敏度;解调;电路稳定性;