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首页> 外文期刊>IEEE Journal of Solid-State Circuits >Light Source Position Measurement Technique Applicable in SOI Technology
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Light Source Position Measurement Technique Applicable in SOI Technology

机译:SOI技术中的光源位置测量技术

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摘要

Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, additional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration. In this paper a concept for integration is proposed, which especially allows to measure the angles of a far distance light source relative to the surface of the chip and the coordinate system of the integrated structure. The invention makes use of the stack topology and the light opacity of metal layers in the monolithic integration, the light translucency of ${hbox{SiO}}_{2}$, and the electrical light sensitivity of diodes. Because of perfect device isolation the implementation can be done most advantageously in SOI CMOS technology. With minor modifications it is applicable in other integration technologies as well. But leakage currents and device mismatching will limit the obtainable performance additionally.
机译:集成光学传感器通常使用p-n结进行光强度检测。由于成本原因,在标准集成过程中无法使用其他光学组件。因此,在更高级别的光学传感器中,多余的光学组件不是集成的一部分。在本文中,提出了一种集成概念,该概念尤其允许测量远距离光源相对于芯片表面的角度以及集成结构的坐标系。本发明在单片集成中利用了堆叠拓扑和金属层的透光性,$ {hbox {SiO}} _ {2} $的透光率以及二极管的电光敏度。由于完美的器件隔离,可以在SOI CMOS技术中最有利地完成该实现。稍作修改,它也适用于其他集成技术。但是泄漏电流和器件不匹配将另外限制可获得的性能。

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