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首页> 外文期刊>IEEE Journal of Solid-State Circuits >A fourth-order ΣΔ interface for micromachined inertial sensors
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A fourth-order ΣΔ interface for micromachined inertial sensors

机译:用于微机械惯性传感器的四阶ΣΔ接口

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摘要

This paper presents the design and implementation of a high-order ΣΔ interface for micromachined inertial sensors, which employs an electronic filter in series with the mechanical sensor element to reject the excessive in-band quantization noise inherently present in state-of-the-art second-order solutions. A fourth-order prototype was fabricated in a standard 0.5-Μm CMOS process. The active circuit area measures 0.9 mm2, and the interface consumes 13 mW from a 5-V supply and achieves resolution of 1°/s/√Hz with a gyroscope and 150Μg/√Hz with an accelerometer. Comparison between the measured and simulated behavior of the system shows that the contribution of the quantization error to the total noise is negligible.
机译:本文介绍了用于微机械惯性传感器的高阶ΣΔ接口的设计和实现,该接口采用与机械传感器元件串联的电子滤波器来抑制现有技术中固有的过多带内量化噪声二阶解。在标准的0.5μmCMOS工艺中制造了四阶原型。有源电路面积为0.9 mm2,接口从5 V电源消耗的功率为13 mW,陀螺仪的分辨率为1°/ s /√Hz,而加速度计的分辨率为150Mg /√Hz。系统的实测和仿真行为之间的比较表明,量化误差对总噪声的贡献可忽略不计。

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