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首页> 外文期刊>IEEE Journal of Solid-State Circuits >Design on the low-leakage diode string for using in the power-rail ESD clamp circuits in a 0.35-/spl mu/m silicide CMOS process
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Design on the low-leakage diode string for using in the power-rail ESD clamp circuits in a 0.35-/spl mu/m silicide CMOS process

机译:低泄漏二极管串的设计,用于0.35- / splμ/ m硅化物CMOS工艺的电源导轨ESD钳位电路

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摘要

A new design of the diode string with very low leakage current is proposed for use in the ESD clamp circuits across the power rails. By adding an NMOS-controlled lateral SCR (NCLSCR) device into the stacked diode string, the leakage current of this new diode string with six stacked diodes at 5 V (3.3 V) forward bias can be reduced to only 2.1 (1.07) nA at a temperature of 125/spl deg/C in a 0.35 /spl mu/m silicide CMOS process, whereas the previous designs have a leakage current in the order of mA. The total blocking voltage of this new design with NCLSCR can be linearly adjusted by changing the number of the stacked diodes in the diode string without causing latch-up danger across the power rails. From the experimental results, the human-body-model ESD level of the ESD clamp circuit with the proposed low-leakage diode string is greater than 8 kV in a 0.35 /spl mu/m silicide CMOS process by using neither ESD implantation nor the silicide-blocking process modifications.
机译:提出了一种具有极低泄漏电流的二极管串的新设计,可用于跨电源轨的ESD钳位电路。通过将NMOS控制的横向SCR(NCLSCR)器件添加到堆叠的二极管串中,具有6个堆叠二极管的这种新二极管串在5 V(3.3 V)正向偏置时的泄漏电流可以降低至2.1(1.07)nA。在0.35 / spl mu / m的硅化物CMOS工艺中,温度为125 / spl deg / C,而先前的设计的泄漏电流约为mA。可以通过改变二极管串中堆叠二极管的数量来线性调整采用NCLSCR的这种新设计的总阻断电压,而不会引起跨电源轨的闩锁危险。根据实验结果,在不采用ESD注入或不使用硅化物的情况下,采用0.35 / spl mu / m硅化物CMOS工艺,带有建议的低泄漏二极管串的ESD钳位电路的人体模型ESD电平大于8 kV。 -阻止流程修改。

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