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Structural study of Mn-doped ZnO films by TEM

机译：TEM研究Mn掺杂ZnO薄膜的结构

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摘要

The structural study of diluted magnetic semiconductors is important for interpreting the ferromagnetic behavior associated with the materials. In the present work, a series of low concentration Mn-doped ZnO thin films synthesized by pulsed laser deposition was studied by electron microscopy. All films show the wurtzite structure with (001) preferred growth orientation on the Si substrate. Electron diffraction experiments indicate the deterioration of the growth orientation in some areas of the films with increasing Mn concentration, and the existence of a secondary phase, of Mn_2O_3-type, in the films with larger Mn concentrations. High-resolution electron microscopy images confirm the existence of the secondary phase in the grain boundary of the Mn-doped ZnO phase. The magnetic properties of Mn-doped ZnO are discussed in relation to the structures of the films.
机译：稀磁半导体的结构研究对于解释与材料相关的铁磁行为很重要。在本工作中，通过电子显微镜研究了一系列通过脉冲激光沉积合成的低浓度Mn掺杂ZnO薄膜。所有膜均在硅衬底上显示具有（001）优先生长方向的纤锌矿结构。电子衍射实验表明，随着锰浓度的增加，薄膜某些区域的生长取向变差，而锰浓度较大的薄膜中存在着Mn_2O_3-型第二相。高分辨率电子显微镜图像证实了Mn掺杂ZnO相的晶界中存在第二相。讨论了Mn掺杂ZnO的磁性能与薄膜结构的关系。

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