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Bi2O3 rods deposited under atmospheric pressure by means of halide CVD on c-sapphire

机译:Bi2O3棒在大气压力下通过卤化物CVD沉积在c蓝宝石上

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摘要

Bismuth Oxide (Bi2O3) rods are successfully prepared on delta-Bi2O3 films under atmospheric pressure by means of halide chemical vapour deposition using BiI3 and O-2 as a starting material. The deposition of Bi2O3 rods strongly depends on the deposition temperature, the input partial pressure of BiI3 and O-2 and the method for supplying O-2 gas. Bi2O3 rods can be obtained at [O-2]/[Bil(3)] ratios of 500 and N-2:O-2 = 50:250. The length of the Bi2O3 rods increases proportionally from 2 to 30 mu m, while their diameters of between 0.2 and 0.5 mu m do not depend on the deposition time. (c) 2005 Elsevier Ltd. All rights reserved.
机译:通过使用BiI3和O-2作为起始材料的卤化物化学气相沉积,在大气压力下成功地在delta-Bi2O3薄膜上制备了氧化铋(Bi2O3)棒。 Bi2O3棒的沉积在很大程度上取决于沉积温度,BiI3和O-2的输入分压以及供应O-2气体的方法。可以以500的[O-2] / [Bil(3)]比和N-2:O-2 = 50:250获得Bi2O3棒。 Bi2O3棒的长度从2到30μm成比例增加,而其直径在0.2到0.5μm之间不取决于沉积时间。 (c)2005 Elsevier Ltd.保留所有权利。

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