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Patterned aluminum nanowires produced by electron beam at the surfaces of A1F_3 single crystals

机译:电子束在A1F_3单晶表面产生的图案化铝纳米线

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摘要

Cubic- and rectangular-shape single crystals of α-AlF_3 in sizes of 5-50 μm have been synthesized by a solid-vapor phase process. Using the electron beam induced decomposition of AlF_3, a method is demonstrated for fabricating patterned aluminum nanowires in A1F_3 substrate in a scanning electron microscope. By controlling the accelerating voltage, the beam current and scanning time, it is possible to fabricate metallic nanowires of different sizes. The aluminum nanowires may act as nano-interconnects for nanoelectronics. This work demonstrates a potential technique for e-bcam nanofabrication.
机译:通过固汽相法合成了尺寸为5-50μm的α-AlF_3的立方和矩形单晶。利用电子束诱导的AlF_3分解,证明了一种在扫描电子显微镜中在AlF_3衬底中制造带图案的铝纳米线的方法。通过控制加速电压,电子束电流和扫描时间,可以制造不同尺寸的金属纳米线。铝纳米线可以充当纳米电子学的纳米互连。这项工作展示了一种用于e-bcam纳米加工的潜在技术。

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