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首页> 外文期刊>Solid-State Electronics >Advantages of different source/drain engineering on scaled UTBOX FDSOI nMOSFETs at high temperature operation
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Advantages of different source/drain engineering on scaled UTBOX FDSOI nMOSFETs at high temperature operation

机译:在高温下按比例缩放UTBOX FDSOI nMOSFET进行不同源/漏工程的优势

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摘要

The influence of different spacer lengths and tilt-implantation on underlapped devices compared to the standard S/D junctions (with Lightly Doped Drain - LDD) on fully depleted (FD) SOI MOSFETs with Ultra-Thin Buried Oxide (UTBOX) at room and high temperatures is explored. It is shown that devices with longer spacers and no LDD implantation increase the underlap region between the gate edge and the S/D regions, increase the immunity to short channel effects and improve the analog performance even at high temperatures. However, the lateral dopant diffusion can reduce or suppress the underlap formation, mainly for smaller spacer length. Tilt-implanted devices exhibit the same trend as the devices with LDD. The angled implantation favors the dopant diffusion into the underlap regions, which degrades the transistor performance.
机译:与标准S / D结(轻掺杂漏极-LDD)相比,在室内和高空使用超薄埋入氧化物(UTBOX)的全耗尽(FD)SOI MOSFET上,不同间隔物长度和倾斜注入对底层器件的影响探索温度。结果表明,具有更长间隔物且没有LDD注入的器件增加了栅极边缘与S / D区域之间的重叠区域,提高了对短沟道效应的抵抗力,甚至在高温下也提高了模拟性能。然而,横向掺杂剂扩散可以减少或抑制下叠层的形成,主要是对于较小的间隔物长度。植入倾斜装置的趋势与具有LDD的装置相同。成角度的注入有利于掺杂剂扩散到下重叠区中,这降低了晶体管的性能。

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