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Modeling the voltage nonlinearity of high-k MIM capacitors

机译:高k MIM电容器的电压非线性建模

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摘要

Voltage nonlinearity is a crucial performance parameter of MIM capacitors for RF, analog and mixed signal IC applications. In present work, the fabrication and characterization of anodic high-k MIM capacitors are reported in detail and modeling of nonlinearity coefficient of capacitance is developed using polarization of induced dipoles. The model agrees with experimental results for various high-k dielectric MIM capacitors. It explores the origin of nonlinearity in capacitance-voltage characteristics of MIM capacitors and also predicts the potential requirements to meet the ITRS requirements.
机译:电压非线性是MIM电容器在RF,模拟和混合信号IC应用中的关键性能参数。在目前的工作中,详细报道了阳极高k MIM电容器的制造和特性,并利用感应偶极子的极化建立了电容非线性系数的模型。该模型与各种高k介电MIM电容器的实验结果一致。它探讨了MIM电容器的电容-电压特性中非线性的起因,并预测了满足ITRS要求的潜在要求。

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