Defect removal using dry cryogenic aerosols

JEFFERY W. BUTTERBAUGH

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Defect removal using dry cryogenic aerosols

机译：使用干燥的低温气雾剂清除缺陷

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The non-damaging, high particle removal efficiency of cryogenic aerosol cleaning is well-established across various IC process nodes as a critical factor in manufacturing yield recovery, especially as an alternative to water and chemicalrnscrub technologies, which are incompatible with new materials. With a PRE performance validated againstrndefects as small as 45nm, cryogenic aerosol cleaning is well-equipped to deliver 99% or better removal of the larger, probe-related defects associated with in-line electrical testing.

机译：低温气溶胶清洁的无损，高颗粒去除效率已在各个IC工艺节点中得到了很好的确立，这是恢复生产良率的关键因素，尤其是作为与新材料不兼容的水和化学洗涤技术的替代品。经过验证的PRE性能可抵御小至45nm的缺陷，设备齐全的低温气溶胶清洁技术可以消除与在线电气测试相关的较大的探头相关缺陷，从而达到99％或更好的去除率。

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《Solid state technology》 |2012年第3期|p.12-14|共3页
作者
JEFFERY W. BUTTERBAUGH;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
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1. Non-Damaging Particle Removal Using Cryogenic Aerosols [J] . Thomas J. Wagener, James F. Weygand, Gregory P. Thomes Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2005,第0期

机译：使用低温气雾剂去除有害颗粒
2. Removal of PM_(2.5) and secondary inorganic aerosols in the North China Plain by dry deposition [J] . Du Jiao, Zhang Xiaodong, Huang Tao, The Science of the Total Environment . 2019,第PTa2期

机译：华北平原干沉降去除PM_（2.5）和二次无机气溶胶
3. Removal of PM_(2.5) and secondary inorganic aerosols in the North China Plain by dry deposition [J] . Du Jiao, Zhang Xiaodong, Huang Tao, The Science of the Total Environment . 2019,第PTa2期

机译：通过干沉积去除华北平原的PM_（2.5）和二级无机气溶胶
4. Defect Removal Using Dry Cryogenic Aerosol Recovers Yield Loss Associated With In-Line Testing - (PPT) [C] . Jeffery W. Butterbaugh ISMI Symposium on Manufacturing Effectiveness . 2011

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Defect removal using dry cryogenic aerosols

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