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首页> 外文期刊>Special topics & reviews in porous media >SIMULATION OF CHEMICAL VAPOR DEPOSITION:FOUR-PHASE MODEL
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SIMULATION OF CHEMICAL VAPOR DEPOSITION:FOUR-PHASE MODEL

机译：化学气相沉积的模拟：四阶段模型

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We are motivated to model plasma-enhanced chemical vapor deposition processes for metallic bipolar plates and their optimization for depositing a homogeneous layer on the metallic plate. Moreover, constraints to the deposition process are very low pressure (nearly a vacuum) and low temperature (about 400 K). This paper derives a computable multi-physics model of a single computable physical problem based on a porous media model. While the micro- and macro-scales are related to adsorption, diffusion, and advection processes, we present a homogenized porous media model that embeds the microscopic scales into the macroscopic scales. We deal with some assumptions to simplify the complicated process so that we can derive a computable mathematical model without neglecting real-life processes. To model the gaseous transport in the apparatus as a porous media model, we derive a multi-phase model based on mobile, immobile, and adsorbed gaseous phases in a chamber that is filled with the plasma medium. The verification of such a complicated model is done with real-life experiments for single species. Numerical simulations help to replace expensive physical experiments and obtain control mechanisms for the delicate deposition process. Numerical methods are discussed to solve such multi-scale and multi-phase models and to obtain qualitative results for the delicate multi-physical processes in the chamber. We discuss a splitting analysis to couple such multi-physical problems. Numerical benchmark problems based on the multi-phase model are presented. Real-life approaches to physical experiments are verified by numerical experiments.
机译：我们有动机为金属双极板的等离子体增强化学气相沉积工艺及其在金属板上沉积均匀层的优化建模。此外，沉积过程的限制条件是非常低的压力（接近真空）和低温（约400 K）。本文基于多孔介质模型，推导了单个可计算物理问题的可计算多物理模型。虽然微观和宏观尺度与吸附，扩散和对流过程有关，但我们提出了将微观尺度嵌入宏观尺度的均质多孔介质模型。我们处理一些假设以简化复杂的过程，以便可以在不忽略实际过程的情况下得出可计算的数学模型。为了将设备中的气体传输建模为多孔介质模型，我们在充满等离子介质的腔室内基于流动，固定和吸附的气相推导了多相模型。这种复杂模型的验证是通过针对单个物种的真实实验完成的。数值模拟有助于取代昂贵的物理实验，并获得精细沉积过程的控制机制。讨论了数值方法，以解决此类多尺度和多阶段模型，并获得室内细微多物理过程的定性结果。我们讨论了分裂分析来耦合这种多物理问题。提出了基于多相模型的数值基准问题。物理实验的实际方法已通过数值实验验证。

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