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High-Sensitivity and Broadband, Real-Time Terahertz Camera Incorporating a Micro-Bolometer Array With Resonant Cavity Structure

机译:高灵敏度和宽带实时太赫兹相机,集成了具有谐振腔结构的微测微计阵列<?Pub _newline?>

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Terahertz (THz) cameras comprising an uncooled micro-bolometer array have been developed for simple THz imaging, and the improvement of their sensitivity is one of the important issues. We fabricated a new micro-bolometer array with a resonant cavity structure for a real-time THz camera, alongside a new method for evaluating the sensitivity across a wide range of the THz frequency region. The frequency dependence of the sensitivity of the THz camera is measured in the 0.5–2.0-THz frequency range taking the polarization dependence into account. It was found that the resonant cavity structure effectively increased the sensitivity of the THz camera, and, actually, the improvement by one order of magnitude was achieved in the frequency range below 1 THz. The THz camera with much enhanced sensitivity will expand the frontiers of real-time THz imaging such as molecular imaging and nondestructive inspection.
机译:已经开发出包括未冷却的微型测辐射热计阵列的太赫兹(THz)摄像机,用于简单的THz成像,其灵敏度的提高是重要的问题之一。我们为实时太赫兹相机制造了一种具有谐振腔结构的新型微辐射热计阵列,并采用了一种新的方法来评估整个太赫兹频率范围内的灵敏度。考虑到偏振相关性,在0.5–2.0-THz频率范围内测量了THz摄像机灵敏度的频率相关性。发现谐振腔结构有效地提高了太赫兹相机的灵敏度,并且实际上,在低于1 THz的频率范围内实现了一个数量级的改善。灵敏度大大提高的太赫兹相机将扩展实时太赫兹成像的领域,例如分子成像和无损检测。

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