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首页> 外文期刊>Thin Solid Films >Encapsulation of polyvinyl alcohol based flexible temperature sensor through spatial atmospheric atomic layer deposition system to enhance its lifetime
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Encapsulation of polyvinyl alcohol based flexible temperature sensor through spatial atmospheric atomic layer deposition system to enhance its lifetime

机译：通过空间大气原子层沉积系统对聚乙烯醇基柔性温度传感器进行封装​​，以延长其使用寿命

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摘要

Printed organic sensors are of significant importance owing to their simplicity, low cost, easy fabrication and solution processability. However, organic sensors often suffer from the drawback of performance degradation when exposed to ambient environment. In this study, polyvinyl alcohol (PVA) is used as the functional layer of a temperature sensor and is encapsulated by aluminum oxide (Al2O3) deposited through spatial atmospheric atomic layer deposition system (SAALD). The encapsulating layer of Al2O3 was pure, atomically thin and highly reliable. Fabricated organic temperature sensor is based on a conductive and uniform interdigitated pattern deposited on a flexible polyethylene naphthalate substrate through advanced printing technology of reverse offset. Thin film of PVA is used as the temperature sensitive functional layer deposited through electrohydrodynamic atomization followed by Al2O3 encapsulation. The developed sensors were tested in the temperature range of 25 degrees C to 90 degrees C with relative humidity reaching up to 75% relative humidity. The obtained results exhibited that Al2O3 encapsulation deposited through SAALD significantly enhanced the linearity, repeatability, endurance (50 cycles), retention (2 months) and lifetime of PVA based temperature sensor as compared with the non-encapsulated sensor hence, protecting the organic device from performance degradation.
机译：印刷有机传感器由于其简单，低成本，易于制造和解决方案可加工性而具有重要意义。然而，有机传感器在暴露于周围环境时常常遭受性能下降的缺点。在这项研究中，聚乙烯醇（PVA）用作温度传感器的功能层，并被通过空间大气原子层沉积系统（SAALD）沉积的氧化铝（Al2O3）封装。 Al2O3的封装层是纯净的，原子上薄且高度可靠。预制的有机温度传感器基于通过反胶印的先进印刷技术沉积在柔性聚萘二甲酸乙二醇酯基板上的均匀且均匀的导电图案。 PVA薄膜用作通过电流体雾化然后Al2O3封装而沉积的温度敏感功能层。所开发的传感器在25摄氏度至90摄氏度的温度范围内进行了测试，相对湿度最高可达到75％的相对湿度。获得的结果表明，与未封装的传感器相比，通过SAALD沉积的Al2O3封装显着提高了基于PVA的温度传感器的线性，可重复性，耐久性（50个循环），保留（2个月）和使用寿命，因此可以保护有机器件免受性能下降。

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