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Structural and compositional analysis of GaSb nanofoams obtained by ion irradiation of sputtered films

机译：溅射膜离子辐照GaSb纳米泡沫的结构与组成分析

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Here we show the formation of GaSb nanofoams by ion irradiation of sputter-deposited GaSb films and a comprehensive characterization of its structural and compositional properties. Polycrystalline GaSb films deposited on SiO2/Si substrates were irradiated with 16 MeV Au+7 ions, in the fluence range 1 x 10(12)-3 x 10 14 cm(-2), and the structural and compositional changes induced by ion irradiation were characterized by Rutherford backscattering spectrometry, scanning electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy and x-ray absorption fine structure analyses. We demonstrate that GaSb films deposited by magnetron sputtering at 400 degrees C are polycrystalline, with zincblende phase, and ion irradiation induces increasing disorder for irradiation fluences up to 1 x 10(13) cm(-2), beyond which the films become amorphous. At 1 x 10(14) cm(-2), porosity reaches significant levels, contributing to the increase in Ga-O bonding throughout the film, accompanied by a decrease in Ga-Sb bonding as well as an expansion in the Ga-Sb bond length, consistent with the increase in effective surface area due to the formation of nanometric foams. The first few nanometres close to the surface exhibit only Ga-O bonding, even for polycrystalline films, in addition to Sb-Sb and Sb-O. The Ga-O component at the surface shows high irradiation resistance, while ion irradiation favors Sb-Sb bonding in expense of Sb-O bonding.
机译：在这里，我们展示了通过离子辐照溅射沉积的GaSb薄膜形成的GaSb纳米泡沫及其结构和组成特性的全面表征。在1 x 10（12）-3 x 10 14 cm（-2）的注量范围内，用16 MeV Au + 7离子辐照沉积在SiO2 / Si衬底上的多晶GaSb膜，并通过离子辐照引起结构和组成变化通过卢瑟福反向散射光谱，扫描电子显微镜，X射线衍射，X射线光电子能谱和X射线吸收精细结构分析对其进行了表征。我们证明了通过磁控溅射在400摄氏度下沉积的GaSb薄膜是多晶的，具有闪锌矿相，并且离子辐照引起的辐照通量高达1 x 10（13）cm（-2）的增加，超出该范围，薄膜将变为非晶态。在1 x 10（14）cm（-2）处，孔隙率达到显着水平，导致整个膜中Ga-O键的增加，同时Ga-Sb键的减少以及Ga-Sb的膨胀结合长度，与由于形成纳米泡沫而增加的有效表面积一致。除了Sb-Sb和Sb-O以外，靠近表面的前几个纳米甚至对多晶膜也仅显示Ga-O键。表面的Ga-O成分显示出高的耐辐照性，而离子辐照有利于Sb-Sb键合，而以Sb-O键合为代价。

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