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Hf2Co11 thin films: Rare-earth-free permanent nanomagnets

机译：Hf2Co11薄膜：无稀土永磁体

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Hf2Co11 thin films were deposited on single crystalline Si(100) substrates by using conventional direct current (DC) magnetron sputtering with a Hf2Co11 alloy target. All films were grown at room temperature with 120W sputtering power. In order to obtain the composition of the desired, the working pressure was changed from 0.66 to 1.05 Pa. The relationships between structural and magnetic properties in Hf-Co films were studied by using differential thermal analyzer, glancing incidence X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis, atomic force microscopy, magnetic force microscopy and vibrating sample magnetometer. It revealed that the as-deposited films were amorphous at room temperature for all deposition pressures and showed soft ferromagnetic phase. In order to increase the coercive field associated with an advancing transition to hard phase, thin films were post-annealed from 773 K to 973 K. Post-annealing process led to a high remanence magnetization and improved the squareness of the demagnetization curve. Their saturation magnetization values varied from 515 to 1378 kA/m and also coercive field values varied from 52x10(-4) to 153x10(-3) Tat room temperature depending on post-annealing temperatures. Hf2Co11 soft ferromagnetic phase was modified by formation of post-annealing and was given rise to enhance permanent magnet properties (saturation magnetization, coercive field, energy product). The magnetic properties of thin films were found to be convenient for nanomagnet applications. (C) 2017 Elsevier B.V. All rights reserved.
机译：通过使用常规的Hf2Co11合金靶材进行直流（DC）磁控溅射，将Hf2Co11薄膜沉积在单晶Si（100）衬底上。所有膜均在室温下以120W溅射功率生长。为了获得所需的组成，工作压力从0.66 Pa更改为1.05 Pa。使用差示热分析仪，掠射X射线衍射，扫描电子研究了Hf-Co膜的结构和磁性之间的关系。显微镜，能量色散X射线分析，原子力显微镜，磁力显微镜和振动样品磁力计。结果表明，所沉积的薄膜在室温下对于所有沉积压力均为非晶态，并显示出软铁磁相。为了增加与前进到硬相过渡相关的矫顽场，将薄膜从773 K退火到973K。后退火过程导致高剩磁化并改善了退磁曲线的矩形度。它们的饱和磁化强度值从515到1378 kA / m不等，矫顽场值在室温下从52x10（-4）到153x10（-3）Tat不等，具体取决于退火后的温度。 Hf2Co11软铁磁相通过后退火的形成进行了改性，并被提高了永磁性能（饱和磁化强度，矫顽场，能量积）。发现薄膜的磁性适合于纳米磁体的应用。 （C）2017 Elsevier B.V.保留所有权利。

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