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Oxygen diffusion in TiO2 films studied by electron and ion Rutherford backscattering

机译:电子和离子卢瑟福反向散射研究TiO2薄膜中的氧扩散

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摘要

The diffusivity of oxygen in thin, sputter-deposited TiO2 films, as can be used in RRAMs, is measured using electron and ion backscattering techniques. The as-grown sample consisted of two layers (Ti O-16(2) and Ti O-18(2)) and was annealed between 500 degrees C and 900 degrees C. The depth profiles of O-18, as measured with both techniques, were similar. The extent of diffusion was much larger than expected from the literature data for O diffusion in single-crystal rutile, suggesting that defects in the sputter-deposited film play an essential role in the diffusion process. (C) 2017 Elsevier B.V. All rights reserved.
机译:RRAM中可以使用的溅射沉积的TiO2薄膜中氧气的扩散率是使用电子和离子反向散射技术测量的。刚生长的样品由两层(Ti O-16(2)和Ti O-18(2))组成,并在500摄氏度和900摄氏度之间进行退火。技术,是相似的。扩散程度远大于单晶金红石中O扩散的文献数据预期值,这表明溅射沉积膜中的缺陷在扩散过程中起着至关重要的作用。 (C)2017 Elsevier B.V.保留所有权利。

著录项

  • 来源
    《Thin Solid Films》 |2017年第may1期|97-102|共6页
  • 作者单位

    Univ Fed Rio Grande do Sul, Inst Fis, Porto Alegre, RS, Brazil;

    Australian Natl Univ, Res Sch Phys & Engn, Dept Elect Mat Engn, Canberra, ACT, Australia;

    Australian Natl Univ, Res Sch Phys & Engn, Dept Elect Mat Engn, Canberra, ACT, Australia;

    Australian Natl Univ, Res Sch Phys & Engn, Dept Elect Mat Engn, Canberra, ACT, Australia;

    Australian Natl Univ, Res Sch Phys & Engn, Dept Elect Mat Engn, Canberra, ACT, Australia|Australian Natl Univ, Res Sch Phys & Engn, Atom Lab, Canberra, ACT, Australia|Australian Natl Univ, Res Sch Phys & Engn, Mol Phys Labs, Canberra, ACT, Australia;

    Univ Fed Rio Grande do Sul, Inst Fis, Porto Alegre, RS, Brazil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Diffusion; RBS; Electron-RBS;

    机译:扩散;RBS;电子-RBS;

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