...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Thin Solid Films >Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure
【24h】

Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

机译：在大气压下使用非热等离子体射流进行液体辅助等离子体增强的化学气相沉积

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The present study introduces a process for the synthesis of functional films onto substrates directly from the liquid phase. The reported method is based on the initialization of the synthesis by means of an atmospheric pressure plasma jet operating with argon above a thin liquid film of the starting material. The process is demonstrated by the formation of a thin, solid SiOx film from siloxane-based liquid precursors. Changes in the chemical properties of the precursor were studied in-situ during the polymerization process on the diamond crystal by using Fourier transform infrared spectroscopy The elemental composition of the SiOxCy films was analyzed by X-ray photoelectron spectroscopy (XPS). Furthermore, XPS was applied to study the effect of post-annealing processes on the composition of the films. The obtained deposits exhibit a low concentration of carbon groups. The amount of hydroxyl groups and interstitial water can be reduced significantly by post-process annealing of the films. (C) 2016 The Author(s). Published by Elsevier B.V.
机译：本研究介绍了一种直接从液相在基材上合成功能膜的方法。所报道的方法基于通过大气压等离子体射流的合成的初始化，所述大气压等离子体射流在原料的薄液膜上方以氩气操作。由硅氧烷基液体前体形成的固态SiOx薄膜证明了这一过程。使用傅立叶变换红外光谱法在金刚石晶体上的聚合过程中就地研究了前体的化学性质变化。通过X射线光电子能谱（XPS）分析了SiOxCy膜的元素组成。此外，XPS还用于研究退火后工艺对薄膜成分的影响。所获得的沉积物显示出低浓度的碳基团。通过薄膜的后处理退火可以显着减少羟基和间隙水的量。 （C）2016作者。由Elsevier B.V.发布

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号